4/4/2011	10:12:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/4/2011	10:12:58 AM	Recipe started at 10:12 AM
4/4/2011	10:12:59 AM	H2 valve closed
4/4/2011	10:12:59 AM	BCl3 valve closed
4/4/2011	10:12:59 AM	PH3 valve closed
4/4/2011	10:12:59 AM	SiCl4 pre valve closed
4/4/2011	10:12:59 AM	SiCl4 post valve closed
4/4/2011	10:12:59 AM	Main Vac valve closed
4/4/2011	10:12:59 AM	Bypass valve closed
4/4/2011	10:12:59 AM	Bubbler valve closed
4/4/2011	10:12:59 AM	Helium valve opened
4/4/2011	10:12:59 AM	Helium MFC set to  500.000000
4/4/2011	10:12:59 AM	H2 MFC set to  0.000000
4/4/2011	10:12:59 AM	BCl3 MFC set to  0.000000
4/4/2011	10:12:59 AM	PHl3 MFC set to  0.000000
4/4/2011	10:12:59 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:12:59 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:12:59 AM	Tube furnace set to 0
4/4/2011	10:14:17 AM	Helium valve closed
4/4/2011	10:14:17 AM	H2 valve closed
4/4/2011	10:14:17 AM	BCl3 valve closed
4/4/2011	10:14:17 AM	PH3 valve closed
4/4/2011	10:14:17 AM	SiCl4 pre valve closed
4/4/2011	10:14:17 AM	SiCl4 post valve closed
4/4/2011	10:14:17 AM	Main Vac valve closed
4/4/2011	10:14:17 AM	Bypass valve closed
4/4/2011	10:14:17 AM	Bubbler valve closed
4/4/2011	10:14:17 AM	Helium MFC set to  0.000000
4/4/2011	10:14:17 AM	H2 MFC set to  0.000000
4/4/2011	10:14:17 AM	BCl3 MFC set to  0.000000
4/4/2011	10:14:17 AM	PHl3 MFC set to  0.000000
4/4/2011	10:14:17 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:14:17 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:14:18 AM	Tube furnace set to 0
4/4/2011	10:14:18 AM	Run finished at 10:14 AM
4/4/2011	10:14:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/4/2011	10:29:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2011	10:29:29 AM	Recipe started at 10:29 AM
4/4/2011	10:29:29 AM	Helium valve closed
4/4/2011	10:29:29 AM	H2 valve closed
4/4/2011	10:29:29 AM	BCl3 valve closed
4/4/2011	10:29:29 AM	PH3 valve closed
4/4/2011	10:29:29 AM	SiCl4 pre valve closed
4/4/2011	10:29:29 AM	SiCl4 post valve closed
4/4/2011	10:29:29 AM	Main Vac valve closed
4/4/2011	10:29:29 AM	Bubbler valve closed
4/4/2011	10:29:29 AM	Bypass valve opened
4/4/2011	10:29:29 AM	Helium MFC set to  0.000000
4/4/2011	10:29:29 AM	H2 MFC set to  0.000000
4/4/2011	10:29:29 AM	BCl3 MFC set to  0.000000
4/4/2011	10:29:29 AM	PHl3 MFC set to  0.000000
4/4/2011	10:29:29 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:29:29 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:29:29 AM	Tube furnace set to 0
4/4/2011	10:30:00 AM	Helium valve closed
4/4/2011	10:30:00 AM	H2 valve closed
4/4/2011	10:30:00 AM	BCl3 valve closed
4/4/2011	10:30:00 AM	PH3 valve closed
4/4/2011	10:30:00 AM	SiCl4 pre valve closed
4/4/2011	10:30:00 AM	SiCl4 post valve closed
4/4/2011	10:30:00 AM	Bubbler valve closed
4/4/2011	10:30:00 AM	Main Vac valve opened
4/4/2011	10:30:00 AM	Bypass valve opened
4/4/2011	10:30:00 AM	Helium MFC set to  0.000000
4/4/2011	10:30:00 AM	H2 MFC set to  0.000000
4/4/2011	10:30:00 AM	BCl3 MFC set to  0.000000
4/4/2011	10:30:00 AM	PHl3 MFC set to  0.000000
4/4/2011	10:30:00 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:30:00 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:30:00 AM	Tube furnace set to 0
4/4/2011	10:30:01 AM	Run finished at 10:30 AM
4/4/2011	10:30:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2011	10:30:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/4/2011	10:30:18 AM	Recipe started at 10:30 AM
4/4/2011	10:30:18 AM	Helium valve closed
4/4/2011	10:30:18 AM	H2 valve closed
4/4/2011	10:30:18 AM	BCl3 valve closed
4/4/2011	10:30:18 AM	PH3 valve closed
4/4/2011	10:30:18 AM	SiCl4 pre valve closed
4/4/2011	10:30:18 AM	SiCl4 post valve closed
4/4/2011	10:30:18 AM	Main Vac valve closed
4/4/2011	10:30:18 AM	Bubbler valve closed
4/4/2011	10:30:18 AM	Bypass valve opened
4/4/2011	10:30:18 AM	Helium MFC set to  0.000000
4/4/2011	10:30:18 AM	H2 MFC set to  0.000000
4/4/2011	10:30:18 AM	BCl3 MFC set to  0.000000
4/4/2011	10:30:18 AM	PHl3 MFC set to  0.000000
4/4/2011	10:30:18 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:30:18 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:30:18 AM	Tube furnace set to 0
4/4/2011	10:30:18 AM	Helium valve closed
4/4/2011	10:30:18 AM	H2 valve closed
4/4/2011	10:30:18 AM	BCl3 valve closed
4/4/2011	10:30:18 AM	PH3 valve closed
4/4/2011	10:30:18 AM	SiCl4 pre valve closed
4/4/2011	10:30:18 AM	SiCl4 post valve closed
4/4/2011	10:30:18 AM	Bubbler valve closed
4/4/2011	10:30:18 AM	Main Vac valve opened
4/4/2011	10:30:18 AM	Bypass valve opened
4/4/2011	10:30:18 AM	Helium MFC set to  0.000000
4/4/2011	10:30:18 AM	H2 MFC set to  0.000000
4/4/2011	10:30:18 AM	BCl3 MFC set to  0.000000
4/4/2011	10:30:18 AM	PHl3 MFC set to  0.000000
4/4/2011	10:30:18 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:30:18 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:30:18 AM	Tube furnace set to 0
4/4/2011	10:31:18 AM	H2 valve closed
4/4/2011	10:31:18 AM	BCl3 valve closed
4/4/2011	10:31:18 AM	PH3 valve closed
4/4/2011	10:31:18 AM	SiCl4 pre valve closed
4/4/2011	10:31:18 AM	SiCl4 post valve closed
4/4/2011	10:31:18 AM	Bubbler valve closed
4/4/2011	10:31:18 AM	Helium valve opened
4/4/2011	10:31:18 AM	Main Vac valve opened
4/4/2011	10:31:18 AM	Bypass valve opened
4/4/2011	10:31:18 AM	Helium MFC set to  100.000000
4/4/2011	10:31:18 AM	H2 MFC set to  0.000000
4/4/2011	10:31:18 AM	BCl3 MFC set to  0.000000
4/4/2011	10:31:18 AM	PHl3 MFC set to  0.000000
4/4/2011	10:31:18 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:31:18 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:31:18 AM	Tube furnace set to 0
4/4/2011	10:32:18 AM	Helium valve closed
4/4/2011	10:32:18 AM	H2 valve closed
4/4/2011	10:32:18 AM	BCl3 valve closed
4/4/2011	10:32:18 AM	PH3 valve closed
4/4/2011	10:32:18 AM	SiCl4 pre valve closed
4/4/2011	10:32:18 AM	SiCl4 post valve closed
4/4/2011	10:32:18 AM	Bubbler valve closed
4/4/2011	10:32:18 AM	Main Vac valve opened
4/4/2011	10:32:18 AM	Bypass valve opened
4/4/2011	10:32:18 AM	Helium MFC set to  0.000000
4/4/2011	10:32:18 AM	H2 MFC set to  0.000000
4/4/2011	10:32:18 AM	BCl3 MFC set to  0.000000
4/4/2011	10:32:18 AM	PHl3 MFC set to  0.000000
4/4/2011	10:32:18 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:32:18 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:32:19 AM	Tube furnace set to 0
4/4/2011	10:33:19 AM	H2 valve closed
4/4/2011	10:33:19 AM	BCl3 valve closed
4/4/2011	10:33:19 AM	PH3 valve closed
4/4/2011	10:33:19 AM	SiCl4 pre valve closed
4/4/2011	10:33:19 AM	SiCl4 post valve closed
4/4/2011	10:33:19 AM	Bubbler valve closed
4/4/2011	10:33:19 AM	Helium valve opened
4/4/2011	10:33:19 AM	Main Vac valve opened
4/4/2011	10:33:19 AM	Bypass valve opened
4/4/2011	10:33:19 AM	Helium MFC set to  100.000000
4/4/2011	10:33:19 AM	H2 MFC set to  0.000000
4/4/2011	10:33:19 AM	BCl3 MFC set to  0.000000
4/4/2011	10:33:19 AM	PHl3 MFC set to  0.000000
4/4/2011	10:33:19 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:33:19 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:33:19 AM	Tube furnace set to 0
4/4/2011	10:34:19 AM	Helium valve closed
4/4/2011	10:34:19 AM	H2 valve closed
4/4/2011	10:34:19 AM	BCl3 valve closed
4/4/2011	10:34:19 AM	PH3 valve closed
4/4/2011	10:34:19 AM	SiCl4 pre valve closed
4/4/2011	10:34:19 AM	SiCl4 post valve closed
4/4/2011	10:34:19 AM	Bubbler valve closed
4/4/2011	10:34:19 AM	Main Vac valve opened
4/4/2011	10:34:19 AM	Bypass valve opened
4/4/2011	10:34:19 AM	Helium MFC set to  0.000000
4/4/2011	10:34:19 AM	H2 MFC set to  0.000000
4/4/2011	10:34:19 AM	BCl3 MFC set to  0.000000
4/4/2011	10:34:19 AM	PHl3 MFC set to  0.000000
4/4/2011	10:34:19 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:34:19 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:34:19 AM	Tube furnace set to 0
4/4/2011	10:35:19 AM	H2 valve closed
4/4/2011	10:35:19 AM	BCl3 valve closed
4/4/2011	10:35:19 AM	PH3 valve closed
4/4/2011	10:35:19 AM	SiCl4 pre valve closed
4/4/2011	10:35:19 AM	SiCl4 post valve closed
4/4/2011	10:35:19 AM	Bubbler valve closed
4/4/2011	10:35:19 AM	Helium valve opened
4/4/2011	10:35:19 AM	Main Vac valve opened
4/4/2011	10:35:19 AM	Bypass valve opened
4/4/2011	10:35:19 AM	Helium MFC set to  100.000000
4/4/2011	10:35:19 AM	H2 MFC set to  0.000000
4/4/2011	10:35:19 AM	BCl3 MFC set to  0.000000
4/4/2011	10:35:19 AM	PHl3 MFC set to  0.000000
4/4/2011	10:35:19 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:35:19 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:35:19 AM	Tube furnace set to 0
4/4/2011	10:36:19 AM	Helium valve closed
4/4/2011	10:36:19 AM	H2 valve closed
4/4/2011	10:36:19 AM	BCl3 valve closed
4/4/2011	10:36:19 AM	PH3 valve closed
4/4/2011	10:36:19 AM	SiCl4 pre valve closed
4/4/2011	10:36:19 AM	SiCl4 post valve closed
4/4/2011	10:36:19 AM	Bubbler valve closed
4/4/2011	10:36:19 AM	Main Vac valve opened
4/4/2011	10:36:19 AM	Bypass valve opened
4/4/2011	10:36:19 AM	Helium MFC set to  0.000000
4/4/2011	10:36:19 AM	H2 MFC set to  0.000000
4/4/2011	10:36:19 AM	BCl3 MFC set to  0.000000
4/4/2011	10:36:19 AM	PHl3 MFC set to  0.000000
4/4/2011	10:36:19 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:36:19 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:36:19 AM	Tube furnace set to 0
4/4/2011	10:37:19 AM	H2 valve closed
4/4/2011	10:37:19 AM	BCl3 valve closed
4/4/2011	10:37:19 AM	PH3 valve closed
4/4/2011	10:37:19 AM	SiCl4 pre valve closed
4/4/2011	10:37:19 AM	SiCl4 post valve closed
4/4/2011	10:37:19 AM	Bubbler valve closed
4/4/2011	10:37:19 AM	Helium valve opened
4/4/2011	10:37:19 AM	Main Vac valve opened
4/4/2011	10:37:19 AM	Bypass valve opened
4/4/2011	10:37:19 AM	Helium MFC set to  100.000000
4/4/2011	10:37:19 AM	H2 MFC set to  0.000000
4/4/2011	10:37:19 AM	BCl3 MFC set to  0.000000
4/4/2011	10:37:19 AM	PHl3 MFC set to  0.000000
4/4/2011	10:37:19 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:37:19 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:37:20 AM	Tube furnace set to 0
4/4/2011	10:38:20 AM	Helium valve closed
4/4/2011	10:38:20 AM	H2 valve closed
4/4/2011	10:38:20 AM	BCl3 valve closed
4/4/2011	10:38:20 AM	PH3 valve closed
4/4/2011	10:38:20 AM	SiCl4 pre valve closed
4/4/2011	10:38:20 AM	SiCl4 post valve closed
4/4/2011	10:38:20 AM	Bubbler valve closed
4/4/2011	10:38:20 AM	Main Vac valve opened
4/4/2011	10:38:20 AM	Bypass valve opened
4/4/2011	10:38:20 AM	Helium MFC set to  0.000000
4/4/2011	10:38:20 AM	H2 MFC set to  0.000000
4/4/2011	10:38:20 AM	BCl3 MFC set to  0.000000
4/4/2011	10:38:20 AM	PHl3 MFC set to  0.000000
4/4/2011	10:38:20 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:38:20 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:38:20 AM	Tube furnace set to 0
4/4/2011	10:39:20 AM	H2 valve closed
4/4/2011	10:39:20 AM	BCl3 valve closed
4/4/2011	10:39:20 AM	PH3 valve closed
4/4/2011	10:39:20 AM	SiCl4 pre valve closed
4/4/2011	10:39:20 AM	SiCl4 post valve closed
4/4/2011	10:39:20 AM	Bubbler valve closed
4/4/2011	10:39:20 AM	Helium valve opened
4/4/2011	10:39:20 AM	Main Vac valve opened
4/4/2011	10:39:20 AM	Bypass valve opened
4/4/2011	10:39:20 AM	Helium MFC set to  100.000000
4/4/2011	10:39:20 AM	H2 MFC set to  0.000000
4/4/2011	10:39:20 AM	BCl3 MFC set to  0.000000
4/4/2011	10:39:20 AM	PHl3 MFC set to  0.000000
4/4/2011	10:39:20 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:39:20 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:39:20 AM	Tube furnace set to 0
4/4/2011	10:40:20 AM	Helium valve closed
4/4/2011	10:40:20 AM	H2 valve closed
4/4/2011	10:40:20 AM	BCl3 valve closed
4/4/2011	10:40:20 AM	PH3 valve closed
4/4/2011	10:40:20 AM	SiCl4 pre valve closed
4/4/2011	10:40:20 AM	SiCl4 post valve closed
4/4/2011	10:40:20 AM	Bubbler valve closed
4/4/2011	10:40:20 AM	Main Vac valve opened
4/4/2011	10:40:20 AM	Bypass valve opened
4/4/2011	10:40:20 AM	Helium MFC set to  0.000000
4/4/2011	10:40:20 AM	H2 MFC set to  0.000000
4/4/2011	10:40:20 AM	BCl3 MFC set to  0.000000
4/4/2011	10:40:20 AM	PHl3 MFC set to  0.000000
4/4/2011	10:40:20 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:40:20 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:40:20 AM	Tube furnace set to 0
4/4/2011	10:41:20 AM	H2 valve closed
4/4/2011	10:41:20 AM	BCl3 valve closed
4/4/2011	10:41:20 AM	PH3 valve closed
4/4/2011	10:41:20 AM	SiCl4 pre valve closed
4/4/2011	10:41:20 AM	SiCl4 post valve closed
4/4/2011	10:41:20 AM	Bubbler valve closed
4/4/2011	10:41:20 AM	Helium valve opened
4/4/2011	10:41:20 AM	Main Vac valve opened
4/4/2011	10:41:20 AM	Bypass valve opened
4/4/2011	10:41:20 AM	Helium MFC set to  100.000000
4/4/2011	10:41:20 AM	H2 MFC set to  0.000000
4/4/2011	10:41:20 AM	BCl3 MFC set to  0.000000
4/4/2011	10:41:20 AM	PHl3 MFC set to  0.000000
4/4/2011	10:41:20 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:41:20 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:41:20 AM	Tube furnace set to 0
4/4/2011	10:42:20 AM	Helium valve closed
4/4/2011	10:42:20 AM	H2 valve closed
4/4/2011	10:42:20 AM	BCl3 valve closed
4/4/2011	10:42:20 AM	PH3 valve closed
4/4/2011	10:42:20 AM	SiCl4 pre valve closed
4/4/2011	10:42:20 AM	SiCl4 post valve closed
4/4/2011	10:42:20 AM	Bubbler valve closed
4/4/2011	10:42:20 AM	Main Vac valve opened
4/4/2011	10:42:20 AM	Bypass valve opened
4/4/2011	10:42:20 AM	Helium MFC set to  0.000000
4/4/2011	10:42:20 AM	H2 MFC set to  0.000000
4/4/2011	10:42:20 AM	BCl3 MFC set to  0.000000
4/4/2011	10:42:20 AM	PHl3 MFC set to  0.000000
4/4/2011	10:42:20 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:42:20 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:42:21 AM	Tube furnace set to 0
4/4/2011	10:43:21 AM	H2 valve closed
4/4/2011	10:43:21 AM	BCl3 valve closed
4/4/2011	10:43:21 AM	PH3 valve closed
4/4/2011	10:43:21 AM	SiCl4 pre valve closed
4/4/2011	10:43:21 AM	SiCl4 post valve closed
4/4/2011	10:43:21 AM	Bubbler valve closed
4/4/2011	10:43:21 AM	Helium valve opened
4/4/2011	10:43:21 AM	Main Vac valve opened
4/4/2011	10:43:21 AM	Bypass valve opened
4/4/2011	10:43:21 AM	Helium MFC set to  100.000000
4/4/2011	10:43:21 AM	H2 MFC set to  0.000000
4/4/2011	10:43:21 AM	BCl3 MFC set to  0.000000
4/4/2011	10:43:21 AM	PHl3 MFC set to  0.000000
4/4/2011	10:43:21 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:43:21 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:43:21 AM	Tube furnace set to 0
4/4/2011	10:44:21 AM	Helium valve closed
4/4/2011	10:44:21 AM	H2 valve closed
4/4/2011	10:44:21 AM	BCl3 valve closed
4/4/2011	10:44:21 AM	PH3 valve closed
4/4/2011	10:44:21 AM	SiCl4 pre valve closed
4/4/2011	10:44:21 AM	SiCl4 post valve closed
4/4/2011	10:44:21 AM	Bubbler valve closed
4/4/2011	10:44:21 AM	Main Vac valve opened
4/4/2011	10:44:21 AM	Bypass valve opened
4/4/2011	10:44:21 AM	Helium MFC set to  0.000000
4/4/2011	10:44:21 AM	H2 MFC set to  0.000000
4/4/2011	10:44:21 AM	BCl3 MFC set to  0.000000
4/4/2011	10:44:21 AM	PHl3 MFC set to  0.000000
4/4/2011	10:44:21 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:44:21 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:44:21 AM	Tube furnace set to 0
4/4/2011	10:45:21 AM	H2 valve closed
4/4/2011	10:45:21 AM	BCl3 valve closed
4/4/2011	10:45:21 AM	PH3 valve closed
4/4/2011	10:45:21 AM	SiCl4 pre valve closed
4/4/2011	10:45:21 AM	SiCl4 post valve closed
4/4/2011	10:45:21 AM	Bubbler valve closed
4/4/2011	10:45:21 AM	Helium valve opened
4/4/2011	10:45:21 AM	Main Vac valve opened
4/4/2011	10:45:21 AM	Bypass valve opened
4/4/2011	10:45:21 AM	Helium MFC set to  100.000000
4/4/2011	10:45:21 AM	H2 MFC set to  0.000000
4/4/2011	10:45:21 AM	BCl3 MFC set to  0.000000
4/4/2011	10:45:21 AM	PHl3 MFC set to  0.000000
4/4/2011	10:45:21 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:45:21 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:45:21 AM	Tube furnace set to 0
4/4/2011	10:46:21 AM	Helium valve closed
4/4/2011	10:46:21 AM	H2 valve closed
4/4/2011	10:46:21 AM	BCl3 valve closed
4/4/2011	10:46:21 AM	PH3 valve closed
4/4/2011	10:46:21 AM	SiCl4 pre valve closed
4/4/2011	10:46:21 AM	SiCl4 post valve closed
4/4/2011	10:46:21 AM	Bubbler valve closed
4/4/2011	10:46:21 AM	Main Vac valve opened
4/4/2011	10:46:21 AM	Bypass valve opened
4/4/2011	10:46:21 AM	Helium MFC set to  0.000000
4/4/2011	10:46:21 AM	H2 MFC set to  0.000000
4/4/2011	10:46:21 AM	BCl3 MFC set to  0.000000
4/4/2011	10:46:21 AM	PHl3 MFC set to  0.000000
4/4/2011	10:46:21 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:46:21 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:46:21 AM	Tube furnace set to 0
4/4/2011	10:47:21 AM	H2 valve closed
4/4/2011	10:47:21 AM	BCl3 valve closed
4/4/2011	10:47:21 AM	PH3 valve closed
4/4/2011	10:47:21 AM	SiCl4 pre valve closed
4/4/2011	10:47:21 AM	SiCl4 post valve closed
4/4/2011	10:47:21 AM	Bubbler valve closed
4/4/2011	10:47:21 AM	Helium valve opened
4/4/2011	10:47:21 AM	Main Vac valve opened
4/4/2011	10:47:21 AM	Bypass valve opened
4/4/2011	10:47:21 AM	Helium MFC set to  100.000000
4/4/2011	10:47:21 AM	H2 MFC set to  0.000000
4/4/2011	10:47:21 AM	BCl3 MFC set to  0.000000
4/4/2011	10:47:21 AM	PHl3 MFC set to  0.000000
4/4/2011	10:47:21 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:47:21 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:47:22 AM	Tube furnace set to 0
4/4/2011	10:48:22 AM	Helium valve closed
4/4/2011	10:48:22 AM	H2 valve closed
4/4/2011	10:48:22 AM	BCl3 valve closed
4/4/2011	10:48:22 AM	PH3 valve closed
4/4/2011	10:48:22 AM	SiCl4 pre valve closed
4/4/2011	10:48:22 AM	SiCl4 post valve closed
4/4/2011	10:48:22 AM	Bubbler valve closed
4/4/2011	10:48:22 AM	Main Vac valve opened
4/4/2011	10:48:22 AM	Bypass valve opened
4/4/2011	10:48:22 AM	Helium MFC set to  0.000000
4/4/2011	10:48:22 AM	H2 MFC set to  0.000000
4/4/2011	10:48:22 AM	BCl3 MFC set to  0.000000
4/4/2011	10:48:22 AM	PHl3 MFC set to  0.000000
4/4/2011	10:48:22 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:48:22 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:48:22 AM	Tube furnace set to 0
4/4/2011	10:49:22 AM	H2 valve closed
4/4/2011	10:49:22 AM	BCl3 valve closed
4/4/2011	10:49:22 AM	PH3 valve closed
4/4/2011	10:49:22 AM	SiCl4 pre valve closed
4/4/2011	10:49:22 AM	SiCl4 post valve closed
4/4/2011	10:49:22 AM	Bubbler valve closed
4/4/2011	10:49:22 AM	Helium valve opened
4/4/2011	10:49:22 AM	Main Vac valve opened
4/4/2011	10:49:22 AM	Bypass valve opened
4/4/2011	10:49:22 AM	Helium MFC set to  100.000000
4/4/2011	10:49:22 AM	H2 MFC set to  0.000000
4/4/2011	10:49:22 AM	BCl3 MFC set to  0.000000
4/4/2011	10:49:22 AM	PHl3 MFC set to  0.000000
4/4/2011	10:49:22 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:49:22 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:49:22 AM	Tube furnace set to 0
4/4/2011	10:50:22 AM	Helium valve closed
4/4/2011	10:50:22 AM	H2 valve closed
4/4/2011	10:50:22 AM	BCl3 valve closed
4/4/2011	10:50:22 AM	PH3 valve closed
4/4/2011	10:50:22 AM	SiCl4 pre valve closed
4/4/2011	10:50:22 AM	SiCl4 post valve closed
4/4/2011	10:50:22 AM	Bubbler valve closed
4/4/2011	10:50:22 AM	Main Vac valve opened
4/4/2011	10:50:22 AM	Bypass valve opened
4/4/2011	10:50:22 AM	Helium MFC set to  0.000000
4/4/2011	10:50:22 AM	H2 MFC set to  0.000000
4/4/2011	10:50:22 AM	BCl3 MFC set to  0.000000
4/4/2011	10:50:22 AM	PHl3 MFC set to  0.000000
4/4/2011	10:50:22 AM	SiCl4 MFC set to  0.000000
4/4/2011	10:50:22 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	10:50:22 AM	Tube furnace set to 0
4/4/2011	10:50:23 AM	Run finished at 10:50 AM
4/4/2011	10:50:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/4/2011	10:54:11 AM	Helium MFC set to  20.000000
4/4/2011	10:54:12 AM	Helium valve opened
4/4/2011	11:48:05 AM	Helium valve closed
4/4/2011	11:48:58 AM	Recipe started at 11:48 AM
4/4/2011	11:48:58 AM	Helium valve closed
4/4/2011	11:48:58 AM	BCl3 valve closed
4/4/2011	11:48:58 AM	PH3 valve closed
4/4/2011	11:48:58 AM	SiCl4 pre valve closed
4/4/2011	11:48:58 AM	SiCl4 post valve closed
4/4/2011	11:48:58 AM	Main Vac valve closed
4/4/2011	11:48:58 AM	Bypass valve closed
4/4/2011	11:48:58 AM	Bubbler valve closed
4/4/2011	11:48:58 AM	H2 valve opened
4/4/2011	11:48:58 AM	Helium MFC set to  0.000000
4/4/2011	11:48:58 AM	H2 MFC set to  500.000000
4/4/2011	11:48:58 AM	BCl3 MFC set to  0.000000
4/4/2011	11:48:58 AM	PHl3 MFC set to  0.000000
4/4/2011	11:48:58 AM	SiCl4 MFC set to  0.000000
4/4/2011	11:48:58 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	11:48:58 AM	Tube furnace set to 0
4/4/2011	11:50:21 AM	Helium valve closed
4/4/2011	11:50:21 AM	BCl3 valve closed
4/4/2011	11:50:21 AM	PH3 valve closed
4/4/2011	11:50:21 AM	SiCl4 pre valve closed
4/4/2011	11:50:21 AM	SiCl4 post valve closed
4/4/2011	11:50:21 AM	Main Vac valve closed
4/4/2011	11:50:21 AM	Bypass valve closed
4/4/2011	11:50:21 AM	H2 valve opened
4/4/2011	11:50:21 AM	Bubbler valve opened
4/4/2011	11:50:21 AM	Helium MFC set to  0.000000
4/4/2011	11:50:21 AM	H2 MFC set to  500.000000
4/4/2011	11:50:21 AM	BCl3 MFC set to  0.000000
4/4/2011	11:50:21 AM	PHl3 MFC set to  0.000000
4/4/2011	11:50:21 AM	SiCl4 MFC set to  0.000000
4/4/2011	11:50:21 AM	Bypass solenoid MFC set to  0.000000
4/4/2011	11:50:21 AM	Tube furnace set to 1000
4/4/2011	12:10:21 PM	Helium valve closed
4/4/2011	12:10:21 PM	BCl3 valve closed
4/4/2011	12:10:21 PM	PH3 valve closed
4/4/2011	12:10:21 PM	Main Vac valve closed
4/4/2011	12:10:21 PM	Bypass valve closed
4/4/2011	12:10:21 PM	H2 valve opened
4/4/2011	12:10:21 PM	SiCl4 pre valve opened
4/4/2011	12:10:21 PM	SiCl4 post valve opened
4/4/2011	12:10:21 PM	Bubbler valve opened
4/4/2011	12:10:21 PM	Helium MFC set to  0.000000
4/4/2011	12:10:21 PM	H2 MFC set to  500.000000
4/4/2011	12:10:21 PM	BCl3 MFC set to  0.000000
4/4/2011	12:10:21 PM	PHl3 MFC set to  0.000000
4/4/2011	12:10:21 PM	SiCl4 MFC set to  85.000000
4/4/2011	12:10:21 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	12:10:21 PM	Tube furnace set to 1000
4/4/2011	12:30:21 PM	H2 valve closed
4/4/2011	12:30:21 PM	BCl3 valve closed
4/4/2011	12:30:21 PM	PH3 valve closed
4/4/2011	12:30:21 PM	SiCl4 pre valve closed
4/4/2011	12:30:21 PM	SiCl4 post valve closed
4/4/2011	12:30:21 PM	Main Vac valve closed
4/4/2011	12:30:21 PM	Bypass valve closed
4/4/2011	12:30:21 PM	Helium valve opened
4/4/2011	12:30:21 PM	Bubbler valve opened
4/4/2011	12:30:21 PM	Helium MFC set to  500.000000
4/4/2011	12:30:21 PM	H2 MFC set to  0.000000
4/4/2011	12:30:21 PM	BCl3 MFC set to  0.000000
4/4/2011	12:30:21 PM	PHl3 MFC set to  0.000000
4/4/2011	12:30:21 PM	SiCl4 MFC set to  0.000000
4/4/2011	12:30:21 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	12:30:21 PM	Tube furnace set to 0
4/4/2011	12:52:35 PM	H2 valve closed
4/4/2011	12:52:35 PM	BCl3 valve closed
4/4/2011	12:52:35 PM	PH3 valve closed
4/4/2011	12:52:35 PM	SiCl4 pre valve closed
4/4/2011	12:52:35 PM	SiCl4 post valve closed
4/4/2011	12:52:35 PM	Main Vac valve closed
4/4/2011	12:52:35 PM	Bypass valve closed
4/4/2011	12:52:35 PM	Helium valve opened
4/4/2011	12:52:35 PM	Bubbler valve opened
4/4/2011	12:52:35 PM	Helium MFC set to  500.000000
4/4/2011	12:52:35 PM	H2 MFC set to  0.000000
4/4/2011	12:52:35 PM	BCl3 MFC set to  0.000000
4/4/2011	12:52:35 PM	PHl3 MFC set to  0.000000
4/4/2011	12:52:35 PM	SiCl4 MFC set to  0.000000
4/4/2011	12:52:35 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	12:52:36 PM	Tube furnace set to 0
4/4/2011	12:53:11 PM	Helium valve closed
4/4/2011	12:53:11 PM	H2 valve closed
4/4/2011	12:53:11 PM	BCl3 valve closed
4/4/2011	12:53:11 PM	PH3 valve closed
4/4/2011	12:53:11 PM	SiCl4 pre valve closed
4/4/2011	12:53:11 PM	SiCl4 post valve closed
4/4/2011	12:53:11 PM	Main Vac valve closed
4/4/2011	12:53:11 PM	Bypass valve closed
4/4/2011	12:53:11 PM	Bubbler valve closed
4/4/2011	12:53:11 PM	Helium MFC set to  0.000000
4/4/2011	12:53:11 PM	H2 MFC set to  0.000000
4/4/2011	12:53:11 PM	BCl3 MFC set to  0.000000
4/4/2011	12:53:11 PM	PHl3 MFC set to  0.000000
4/4/2011	12:53:11 PM	SiCl4 MFC set to  0.000000
4/4/2011	12:53:11 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	12:53:12 PM	Tube furnace set to 0
4/4/2011	12:53:12 PM	Run finished at 12:53 PM
4/4/2011	1:02:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2011	1:02:56 PM	Recipe started at 1:02 PM
4/4/2011	1:02:57 PM	Helium valve closed
4/4/2011	1:02:57 PM	H2 valve closed
4/4/2011	1:02:57 PM	BCl3 valve closed
4/4/2011	1:02:57 PM	PH3 valve closed
4/4/2011	1:02:57 PM	SiCl4 pre valve closed
4/4/2011	1:02:57 PM	SiCl4 post valve closed
4/4/2011	1:02:57 PM	Main Vac valve closed
4/4/2011	1:02:57 PM	Bubbler valve closed
4/4/2011	1:02:57 PM	Bypass valve opened
4/4/2011	1:02:57 PM	Helium MFC set to  0.000000
4/4/2011	1:02:57 PM	H2 MFC set to  0.000000
4/4/2011	1:02:57 PM	BCl3 MFC set to  0.000000
4/4/2011	1:02:57 PM	PHl3 MFC set to  0.000000
4/4/2011	1:02:57 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:02:57 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:02:57 PM	Tube furnace set to 0
4/4/2011	1:03:29 PM	Helium valve closed
4/4/2011	1:03:29 PM	H2 valve closed
4/4/2011	1:03:29 PM	BCl3 valve closed
4/4/2011	1:03:29 PM	PH3 valve closed
4/4/2011	1:03:29 PM	SiCl4 pre valve closed
4/4/2011	1:03:29 PM	SiCl4 post valve closed
4/4/2011	1:03:29 PM	Bubbler valve closed
4/4/2011	1:03:29 PM	Main Vac valve opened
4/4/2011	1:03:29 PM	Bypass valve opened
4/4/2011	1:03:29 PM	Helium MFC set to  0.000000
4/4/2011	1:03:29 PM	H2 MFC set to  0.000000
4/4/2011	1:03:29 PM	BCl3 MFC set to  0.000000
4/4/2011	1:03:29 PM	PHl3 MFC set to  0.000000
4/4/2011	1:03:29 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:03:29 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:03:29 PM	Tube furnace set to 0
4/4/2011	1:03:30 PM	Run finished at 1:03 PM
4/4/2011	1:03:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2011	1:03:44 PM	Helium MFC set to  10.000000
4/4/2011	1:03:45 PM	Helium valve opened
4/4/2011	1:29:01 PM	Helium valve closed
4/4/2011	1:29:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/4/2011	1:29:15 PM	Recipe started at 1:29 PM
4/4/2011	1:29:15 PM	Helium valve closed
4/4/2011	1:29:15 PM	H2 valve closed
4/4/2011	1:29:15 PM	BCl3 valve closed
4/4/2011	1:29:15 PM	PH3 valve closed
4/4/2011	1:29:15 PM	SiCl4 pre valve closed
4/4/2011	1:29:15 PM	SiCl4 post valve closed
4/4/2011	1:29:15 PM	Main Vac valve closed
4/4/2011	1:29:15 PM	Bubbler valve closed
4/4/2011	1:29:15 PM	Bypass valve opened
4/4/2011	1:29:15 PM	Helium MFC set to  0.000000
4/4/2011	1:29:15 PM	H2 MFC set to  0.000000
4/4/2011	1:29:15 PM	BCl3 MFC set to  0.000000
4/4/2011	1:29:15 PM	PHl3 MFC set to  0.000000
4/4/2011	1:29:15 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:29:15 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:29:15 PM	Tube furnace set to 0
4/4/2011	1:29:15 PM	Helium valve closed
4/4/2011	1:29:15 PM	H2 valve closed
4/4/2011	1:29:15 PM	BCl3 valve closed
4/4/2011	1:29:15 PM	PH3 valve closed
4/4/2011	1:29:15 PM	SiCl4 pre valve closed
4/4/2011	1:29:15 PM	SiCl4 post valve closed
4/4/2011	1:29:15 PM	Bubbler valve closed
4/4/2011	1:29:15 PM	Main Vac valve opened
4/4/2011	1:29:15 PM	Bypass valve opened
4/4/2011	1:29:15 PM	Helium MFC set to  0.000000
4/4/2011	1:29:15 PM	H2 MFC set to  0.000000
4/4/2011	1:29:15 PM	BCl3 MFC set to  0.000000
4/4/2011	1:29:15 PM	PHl3 MFC set to  0.000000
4/4/2011	1:29:15 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:29:15 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:29:15 PM	Tube furnace set to 0
4/4/2011	1:30:15 PM	H2 valve closed
4/4/2011	1:30:15 PM	BCl3 valve closed
4/4/2011	1:30:15 PM	PH3 valve closed
4/4/2011	1:30:15 PM	SiCl4 pre valve closed
4/4/2011	1:30:15 PM	SiCl4 post valve closed
4/4/2011	1:30:15 PM	Bubbler valve closed
4/4/2011	1:30:15 PM	Helium valve opened
4/4/2011	1:30:15 PM	Main Vac valve opened
4/4/2011	1:30:15 PM	Bypass valve opened
4/4/2011	1:30:15 PM	Helium MFC set to  100.000000
4/4/2011	1:30:15 PM	H2 MFC set to  0.000000
4/4/2011	1:30:15 PM	BCl3 MFC set to  0.000000
4/4/2011	1:30:15 PM	PHl3 MFC set to  0.000000
4/4/2011	1:30:15 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:30:15 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:30:15 PM	Tube furnace set to 0
4/4/2011	1:31:15 PM	Helium valve closed
4/4/2011	1:31:15 PM	H2 valve closed
4/4/2011	1:31:15 PM	BCl3 valve closed
4/4/2011	1:31:15 PM	PH3 valve closed
4/4/2011	1:31:15 PM	SiCl4 pre valve closed
4/4/2011	1:31:15 PM	SiCl4 post valve closed
4/4/2011	1:31:15 PM	Bubbler valve closed
4/4/2011	1:31:15 PM	Main Vac valve opened
4/4/2011	1:31:15 PM	Bypass valve opened
4/4/2011	1:31:15 PM	Helium MFC set to  0.000000
4/4/2011	1:31:15 PM	H2 MFC set to  0.000000
4/4/2011	1:31:15 PM	BCl3 MFC set to  0.000000
4/4/2011	1:31:15 PM	PHl3 MFC set to  0.000000
4/4/2011	1:31:15 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:31:15 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:31:16 PM	Tube furnace set to 0
4/4/2011	1:32:16 PM	H2 valve closed
4/4/2011	1:32:16 PM	BCl3 valve closed
4/4/2011	1:32:16 PM	PH3 valve closed
4/4/2011	1:32:16 PM	SiCl4 pre valve closed
4/4/2011	1:32:16 PM	SiCl4 post valve closed
4/4/2011	1:32:16 PM	Bubbler valve closed
4/4/2011	1:32:16 PM	Helium valve opened
4/4/2011	1:32:16 PM	Main Vac valve opened
4/4/2011	1:32:16 PM	Bypass valve opened
4/4/2011	1:32:16 PM	Helium MFC set to  100.000000
4/4/2011	1:32:16 PM	H2 MFC set to  0.000000
4/4/2011	1:32:16 PM	BCl3 MFC set to  0.000000
4/4/2011	1:32:16 PM	PHl3 MFC set to  0.000000
4/4/2011	1:32:16 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:32:16 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:32:16 PM	Tube furnace set to 0
4/4/2011	1:33:16 PM	Helium valve closed
4/4/2011	1:33:16 PM	H2 valve closed
4/4/2011	1:33:16 PM	BCl3 valve closed
4/4/2011	1:33:16 PM	PH3 valve closed
4/4/2011	1:33:16 PM	SiCl4 pre valve closed
4/4/2011	1:33:16 PM	SiCl4 post valve closed
4/4/2011	1:33:16 PM	Bubbler valve closed
4/4/2011	1:33:16 PM	Main Vac valve opened
4/4/2011	1:33:16 PM	Bypass valve opened
4/4/2011	1:33:16 PM	Helium MFC set to  0.000000
4/4/2011	1:33:16 PM	H2 MFC set to  0.000000
4/4/2011	1:33:16 PM	BCl3 MFC set to  0.000000
4/4/2011	1:33:16 PM	PHl3 MFC set to  0.000000
4/4/2011	1:33:16 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:33:16 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:33:16 PM	Tube furnace set to 0
4/4/2011	1:34:16 PM	H2 valve closed
4/4/2011	1:34:16 PM	BCl3 valve closed
4/4/2011	1:34:16 PM	PH3 valve closed
4/4/2011	1:34:16 PM	SiCl4 pre valve closed
4/4/2011	1:34:16 PM	SiCl4 post valve closed
4/4/2011	1:34:16 PM	Bubbler valve closed
4/4/2011	1:34:16 PM	Helium valve opened
4/4/2011	1:34:16 PM	Main Vac valve opened
4/4/2011	1:34:16 PM	Bypass valve opened
4/4/2011	1:34:16 PM	Helium MFC set to  100.000000
4/4/2011	1:34:16 PM	H2 MFC set to  0.000000
4/4/2011	1:34:16 PM	BCl3 MFC set to  0.000000
4/4/2011	1:34:16 PM	PHl3 MFC set to  0.000000
4/4/2011	1:34:16 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:34:16 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:34:16 PM	Tube furnace set to 0
4/4/2011	1:35:16 PM	Helium valve closed
4/4/2011	1:35:16 PM	H2 valve closed
4/4/2011	1:35:16 PM	BCl3 valve closed
4/4/2011	1:35:16 PM	PH3 valve closed
4/4/2011	1:35:16 PM	SiCl4 pre valve closed
4/4/2011	1:35:16 PM	SiCl4 post valve closed
4/4/2011	1:35:16 PM	Bubbler valve closed
4/4/2011	1:35:16 PM	Main Vac valve opened
4/4/2011	1:35:16 PM	Bypass valve opened
4/4/2011	1:35:16 PM	Helium MFC set to  0.000000
4/4/2011	1:35:16 PM	H2 MFC set to  0.000000
4/4/2011	1:35:16 PM	BCl3 MFC set to  0.000000
4/4/2011	1:35:16 PM	PHl3 MFC set to  0.000000
4/4/2011	1:35:16 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:35:16 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:35:16 PM	Tube furnace set to 0
4/4/2011	1:36:16 PM	H2 valve closed
4/4/2011	1:36:16 PM	BCl3 valve closed
4/4/2011	1:36:16 PM	PH3 valve closed
4/4/2011	1:36:16 PM	SiCl4 pre valve closed
4/4/2011	1:36:16 PM	SiCl4 post valve closed
4/4/2011	1:36:16 PM	Bubbler valve closed
4/4/2011	1:36:16 PM	Helium valve opened
4/4/2011	1:36:16 PM	Main Vac valve opened
4/4/2011	1:36:16 PM	Bypass valve opened
4/4/2011	1:36:16 PM	Helium MFC set to  100.000000
4/4/2011	1:36:16 PM	H2 MFC set to  0.000000
4/4/2011	1:36:16 PM	BCl3 MFC set to  0.000000
4/4/2011	1:36:16 PM	PHl3 MFC set to  0.000000
4/4/2011	1:36:16 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:36:16 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:36:17 PM	Tube furnace set to 0
4/4/2011	1:37:17 PM	Helium valve closed
4/4/2011	1:37:17 PM	H2 valve closed
4/4/2011	1:37:17 PM	BCl3 valve closed
4/4/2011	1:37:17 PM	PH3 valve closed
4/4/2011	1:37:17 PM	SiCl4 pre valve closed
4/4/2011	1:37:17 PM	SiCl4 post valve closed
4/4/2011	1:37:17 PM	Bubbler valve closed
4/4/2011	1:37:17 PM	Main Vac valve opened
4/4/2011	1:37:17 PM	Bypass valve opened
4/4/2011	1:37:17 PM	Helium MFC set to  0.000000
4/4/2011	1:37:17 PM	H2 MFC set to  0.000000
4/4/2011	1:37:17 PM	BCl3 MFC set to  0.000000
4/4/2011	1:37:17 PM	PHl3 MFC set to  0.000000
4/4/2011	1:37:17 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:37:17 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:37:17 PM	Tube furnace set to 0
4/4/2011	1:38:17 PM	H2 valve closed
4/4/2011	1:38:17 PM	BCl3 valve closed
4/4/2011	1:38:17 PM	PH3 valve closed
4/4/2011	1:38:17 PM	SiCl4 pre valve closed
4/4/2011	1:38:17 PM	SiCl4 post valve closed
4/4/2011	1:38:17 PM	Bubbler valve closed
4/4/2011	1:38:17 PM	Helium valve opened
4/4/2011	1:38:17 PM	Main Vac valve opened
4/4/2011	1:38:17 PM	Bypass valve opened
4/4/2011	1:38:17 PM	Helium MFC set to  100.000000
4/4/2011	1:38:17 PM	H2 MFC set to  0.000000
4/4/2011	1:38:17 PM	BCl3 MFC set to  0.000000
4/4/2011	1:38:17 PM	PHl3 MFC set to  0.000000
4/4/2011	1:38:17 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:38:17 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:38:17 PM	Tube furnace set to 0
4/4/2011	1:39:17 PM	Helium valve closed
4/4/2011	1:39:17 PM	H2 valve closed
4/4/2011	1:39:17 PM	BCl3 valve closed
4/4/2011	1:39:17 PM	PH3 valve closed
4/4/2011	1:39:17 PM	SiCl4 pre valve closed
4/4/2011	1:39:17 PM	SiCl4 post valve closed
4/4/2011	1:39:17 PM	Bubbler valve closed
4/4/2011	1:39:17 PM	Main Vac valve opened
4/4/2011	1:39:17 PM	Bypass valve opened
4/4/2011	1:39:17 PM	Helium MFC set to  0.000000
4/4/2011	1:39:17 PM	H2 MFC set to  0.000000
4/4/2011	1:39:17 PM	BCl3 MFC set to  0.000000
4/4/2011	1:39:17 PM	PHl3 MFC set to  0.000000
4/4/2011	1:39:17 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:39:17 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:39:17 PM	Tube furnace set to 0
4/4/2011	1:40:17 PM	H2 valve closed
4/4/2011	1:40:17 PM	BCl3 valve closed
4/4/2011	1:40:17 PM	PH3 valve closed
4/4/2011	1:40:17 PM	SiCl4 pre valve closed
4/4/2011	1:40:17 PM	SiCl4 post valve closed
4/4/2011	1:40:17 PM	Bubbler valve closed
4/4/2011	1:40:17 PM	Helium valve opened
4/4/2011	1:40:17 PM	Main Vac valve opened
4/4/2011	1:40:17 PM	Bypass valve opened
4/4/2011	1:40:17 PM	Helium MFC set to  100.000000
4/4/2011	1:40:17 PM	H2 MFC set to  0.000000
4/4/2011	1:40:17 PM	BCl3 MFC set to  0.000000
4/4/2011	1:40:17 PM	PHl3 MFC set to  0.000000
4/4/2011	1:40:17 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:40:17 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:40:17 PM	Tube furnace set to 0
4/4/2011	1:41:17 PM	Helium valve closed
4/4/2011	1:41:17 PM	H2 valve closed
4/4/2011	1:41:17 PM	BCl3 valve closed
4/4/2011	1:41:17 PM	PH3 valve closed
4/4/2011	1:41:17 PM	SiCl4 pre valve closed
4/4/2011	1:41:17 PM	SiCl4 post valve closed
4/4/2011	1:41:17 PM	Bubbler valve closed
4/4/2011	1:41:17 PM	Main Vac valve opened
4/4/2011	1:41:17 PM	Bypass valve opened
4/4/2011	1:41:17 PM	Helium MFC set to  0.000000
4/4/2011	1:41:17 PM	H2 MFC set to  0.000000
4/4/2011	1:41:17 PM	BCl3 MFC set to  0.000000
4/4/2011	1:41:17 PM	PHl3 MFC set to  0.000000
4/4/2011	1:41:17 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:41:17 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:41:18 PM	Tube furnace set to 0
4/4/2011	1:42:18 PM	H2 valve closed
4/4/2011	1:42:18 PM	BCl3 valve closed
4/4/2011	1:42:18 PM	PH3 valve closed
4/4/2011	1:42:18 PM	SiCl4 pre valve closed
4/4/2011	1:42:18 PM	SiCl4 post valve closed
4/4/2011	1:42:18 PM	Bubbler valve closed
4/4/2011	1:42:18 PM	Helium valve opened
4/4/2011	1:42:18 PM	Main Vac valve opened
4/4/2011	1:42:18 PM	Bypass valve opened
4/4/2011	1:42:18 PM	Helium MFC set to  100.000000
4/4/2011	1:42:18 PM	H2 MFC set to  0.000000
4/4/2011	1:42:18 PM	BCl3 MFC set to  0.000000
4/4/2011	1:42:18 PM	PHl3 MFC set to  0.000000
4/4/2011	1:42:18 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:42:18 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:42:18 PM	Tube furnace set to 0
4/4/2011	1:43:18 PM	Helium valve closed
4/4/2011	1:43:18 PM	H2 valve closed
4/4/2011	1:43:18 PM	BCl3 valve closed
4/4/2011	1:43:18 PM	PH3 valve closed
4/4/2011	1:43:18 PM	SiCl4 pre valve closed
4/4/2011	1:43:18 PM	SiCl4 post valve closed
4/4/2011	1:43:18 PM	Bubbler valve closed
4/4/2011	1:43:18 PM	Main Vac valve opened
4/4/2011	1:43:18 PM	Bypass valve opened
4/4/2011	1:43:18 PM	Helium MFC set to  0.000000
4/4/2011	1:43:18 PM	H2 MFC set to  0.000000
4/4/2011	1:43:18 PM	BCl3 MFC set to  0.000000
4/4/2011	1:43:18 PM	PHl3 MFC set to  0.000000
4/4/2011	1:43:18 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:43:18 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:43:18 PM	Tube furnace set to 0
4/4/2011	1:44:18 PM	H2 valve closed
4/4/2011	1:44:18 PM	BCl3 valve closed
4/4/2011	1:44:18 PM	PH3 valve closed
4/4/2011	1:44:18 PM	SiCl4 pre valve closed
4/4/2011	1:44:18 PM	SiCl4 post valve closed
4/4/2011	1:44:18 PM	Bubbler valve closed
4/4/2011	1:44:18 PM	Helium valve opened
4/4/2011	1:44:18 PM	Main Vac valve opened
4/4/2011	1:44:18 PM	Bypass valve opened
4/4/2011	1:44:18 PM	Helium MFC set to  100.000000
4/4/2011	1:44:18 PM	H2 MFC set to  0.000000
4/4/2011	1:44:18 PM	BCl3 MFC set to  0.000000
4/4/2011	1:44:18 PM	PHl3 MFC set to  0.000000
4/4/2011	1:44:18 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:44:18 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:44:18 PM	Tube furnace set to 0
4/4/2011	1:45:18 PM	Helium valve closed
4/4/2011	1:45:18 PM	H2 valve closed
4/4/2011	1:45:18 PM	BCl3 valve closed
4/4/2011	1:45:18 PM	PH3 valve closed
4/4/2011	1:45:18 PM	SiCl4 pre valve closed
4/4/2011	1:45:18 PM	SiCl4 post valve closed
4/4/2011	1:45:18 PM	Bubbler valve closed
4/4/2011	1:45:18 PM	Main Vac valve opened
4/4/2011	1:45:18 PM	Bypass valve opened
4/4/2011	1:45:18 PM	Helium MFC set to  0.000000
4/4/2011	1:45:18 PM	H2 MFC set to  0.000000
4/4/2011	1:45:18 PM	BCl3 MFC set to  0.000000
4/4/2011	1:45:18 PM	PHl3 MFC set to  0.000000
4/4/2011	1:45:18 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:45:18 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:45:18 PM	Tube furnace set to 0
4/4/2011	1:46:18 PM	H2 valve closed
4/4/2011	1:46:18 PM	BCl3 valve closed
4/4/2011	1:46:18 PM	PH3 valve closed
4/4/2011	1:46:18 PM	SiCl4 pre valve closed
4/4/2011	1:46:18 PM	SiCl4 post valve closed
4/4/2011	1:46:18 PM	Bubbler valve closed
4/4/2011	1:46:18 PM	Helium valve opened
4/4/2011	1:46:18 PM	Main Vac valve opened
4/4/2011	1:46:18 PM	Bypass valve opened
4/4/2011	1:46:18 PM	Helium MFC set to  100.000000
4/4/2011	1:46:18 PM	H2 MFC set to  0.000000
4/4/2011	1:46:18 PM	BCl3 MFC set to  0.000000
4/4/2011	1:46:18 PM	PHl3 MFC set to  0.000000
4/4/2011	1:46:18 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:46:18 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:46:19 PM	Tube furnace set to 0
4/4/2011	1:47:19 PM	Helium valve closed
4/4/2011	1:47:19 PM	H2 valve closed
4/4/2011	1:47:19 PM	BCl3 valve closed
4/4/2011	1:47:19 PM	PH3 valve closed
4/4/2011	1:47:19 PM	SiCl4 pre valve closed
4/4/2011	1:47:19 PM	SiCl4 post valve closed
4/4/2011	1:47:19 PM	Bubbler valve closed
4/4/2011	1:47:19 PM	Main Vac valve opened
4/4/2011	1:47:19 PM	Bypass valve opened
4/4/2011	1:47:19 PM	Helium MFC set to  0.000000
4/4/2011	1:47:19 PM	H2 MFC set to  0.000000
4/4/2011	1:47:19 PM	BCl3 MFC set to  0.000000
4/4/2011	1:47:19 PM	PHl3 MFC set to  0.000000
4/4/2011	1:47:19 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:47:19 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:47:19 PM	Tube furnace set to 0
4/4/2011	1:48:19 PM	H2 valve closed
4/4/2011	1:48:19 PM	BCl3 valve closed
4/4/2011	1:48:19 PM	PH3 valve closed
4/4/2011	1:48:19 PM	SiCl4 pre valve closed
4/4/2011	1:48:19 PM	SiCl4 post valve closed
4/4/2011	1:48:19 PM	Bubbler valve closed
4/4/2011	1:48:19 PM	Helium valve opened
4/4/2011	1:48:19 PM	Main Vac valve opened
4/4/2011	1:48:19 PM	Bypass valve opened
4/4/2011	1:48:19 PM	Helium MFC set to  100.000000
4/4/2011	1:48:19 PM	H2 MFC set to  0.000000
4/4/2011	1:48:19 PM	BCl3 MFC set to  0.000000
4/4/2011	1:48:19 PM	PHl3 MFC set to  0.000000
4/4/2011	1:48:19 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:48:19 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:48:19 PM	Tube furnace set to 0
4/4/2011	1:49:19 PM	Helium valve closed
4/4/2011	1:49:19 PM	H2 valve closed
4/4/2011	1:49:19 PM	BCl3 valve closed
4/4/2011	1:49:19 PM	PH3 valve closed
4/4/2011	1:49:19 PM	SiCl4 pre valve closed
4/4/2011	1:49:19 PM	SiCl4 post valve closed
4/4/2011	1:49:19 PM	Bubbler valve closed
4/4/2011	1:49:19 PM	Main Vac valve opened
4/4/2011	1:49:19 PM	Bypass valve opened
4/4/2011	1:49:19 PM	Helium MFC set to  0.000000
4/4/2011	1:49:19 PM	H2 MFC set to  0.000000
4/4/2011	1:49:19 PM	BCl3 MFC set to  0.000000
4/4/2011	1:49:19 PM	PHl3 MFC set to  0.000000
4/4/2011	1:49:19 PM	SiCl4 MFC set to  0.000000
4/4/2011	1:49:19 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	1:49:19 PM	Tube furnace set to 0
4/4/2011	1:49:20 PM	Run finished at 1:49 PM
4/4/2011	1:49:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/4/2011	1:58:52 PM	Helium MFC set to  30.000000
4/4/2011	1:58:53 PM	Helium valve opened
4/4/2011	1:59:12 PM	Helium valve closed
4/4/2011	2:00:15 PM	Recipe started at 2:00 PM
4/4/2011	2:00:15 PM	Helium valve closed
4/4/2011	2:00:15 PM	BCl3 valve closed
4/4/2011	2:00:15 PM	PH3 valve closed
4/4/2011	2:00:15 PM	SiCl4 pre valve closed
4/4/2011	2:00:15 PM	SiCl4 post valve closed
4/4/2011	2:00:15 PM	Main Vac valve closed
4/4/2011	2:00:15 PM	Bypass valve closed
4/4/2011	2:00:15 PM	Bubbler valve closed
4/4/2011	2:00:15 PM	H2 valve opened
4/4/2011	2:00:15 PM	Helium MFC set to  0.000000
4/4/2011	2:00:15 PM	H2 MFC set to  500.000000
4/4/2011	2:00:15 PM	BCl3 MFC set to  0.000000
4/4/2011	2:00:15 PM	PHl3 MFC set to  0.000000
4/4/2011	2:00:15 PM	SiCl4 MFC set to  0.000000
4/4/2011	2:00:15 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	2:00:15 PM	Tube furnace set to 0
4/4/2011	2:01:38 PM	Helium valve closed
4/4/2011	2:01:38 PM	BCl3 valve closed
4/4/2011	2:01:38 PM	PH3 valve closed
4/4/2011	2:01:38 PM	SiCl4 pre valve closed
4/4/2011	2:01:38 PM	SiCl4 post valve closed
4/4/2011	2:01:38 PM	Main Vac valve closed
4/4/2011	2:01:38 PM	Bypass valve closed
4/4/2011	2:01:38 PM	H2 valve opened
4/4/2011	2:01:38 PM	Bubbler valve opened
4/4/2011	2:01:38 PM	Helium MFC set to  0.000000
4/4/2011	2:01:38 PM	H2 MFC set to  500.000000
4/4/2011	2:01:38 PM	BCl3 MFC set to  0.000000
4/4/2011	2:01:38 PM	PHl3 MFC set to  0.000000
4/4/2011	2:01:38 PM	SiCl4 MFC set to  0.000000
4/4/2011	2:01:38 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	2:01:38 PM	Tube furnace set to 1000
4/4/2011	2:21:38 PM	Helium valve closed
4/4/2011	2:21:38 PM	BCl3 valve closed
4/4/2011	2:21:38 PM	PH3 valve closed
4/4/2011	2:21:38 PM	Main Vac valve closed
4/4/2011	2:21:38 PM	Bypass valve closed
4/4/2011	2:21:38 PM	H2 valve opened
4/4/2011	2:21:38 PM	SiCl4 pre valve opened
4/4/2011	2:21:38 PM	SiCl4 post valve opened
4/4/2011	2:21:38 PM	Bubbler valve opened
4/4/2011	2:21:38 PM	Helium MFC set to  0.000000
4/4/2011	2:21:38 PM	H2 MFC set to  500.000000
4/4/2011	2:21:38 PM	BCl3 MFC set to  0.000000
4/4/2011	2:21:38 PM	PHl3 MFC set to  0.000000
4/4/2011	2:21:38 PM	SiCl4 MFC set to  85.000000
4/4/2011	2:21:38 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	2:21:38 PM	Tube furnace set to 1000
4/4/2011	2:51:38 PM	H2 valve closed
4/4/2011	2:51:38 PM	BCl3 valve closed
4/4/2011	2:51:38 PM	PH3 valve closed
4/4/2011	2:51:38 PM	SiCl4 pre valve closed
4/4/2011	2:51:38 PM	SiCl4 post valve closed
4/4/2011	2:51:38 PM	Main Vac valve closed
4/4/2011	2:51:38 PM	Bypass valve closed
4/4/2011	2:51:38 PM	Helium valve opened
4/4/2011	2:51:38 PM	Bubbler valve opened
4/4/2011	2:51:38 PM	Helium MFC set to  500.000000
4/4/2011	2:51:38 PM	H2 MFC set to  0.000000
4/4/2011	2:51:38 PM	BCl3 MFC set to  0.000000
4/4/2011	2:51:38 PM	PHl3 MFC set to  0.000000
4/4/2011	2:51:38 PM	SiCl4 MFC set to  0.000000
4/4/2011	2:51:38 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	2:51:38 PM	Tube furnace set to 0
4/4/2011	3:41:38 PM	H2 valve closed
4/4/2011	3:41:38 PM	BCl3 valve closed
4/4/2011	3:41:38 PM	PH3 valve closed
4/4/2011	3:41:38 PM	SiCl4 pre valve closed
4/4/2011	3:41:38 PM	SiCl4 post valve closed
4/4/2011	3:41:38 PM	Main Vac valve closed
4/4/2011	3:41:38 PM	Bypass valve closed
4/4/2011	3:41:38 PM	Helium valve opened
4/4/2011	3:41:38 PM	Bubbler valve opened
4/4/2011	3:41:38 PM	Helium MFC set to  500.000000
4/4/2011	3:41:38 PM	H2 MFC set to  0.000000
4/4/2011	3:41:38 PM	BCl3 MFC set to  0.000000
4/4/2011	3:41:38 PM	PHl3 MFC set to  0.000000
4/4/2011	3:41:38 PM	SiCl4 MFC set to  0.000000
4/4/2011	3:41:38 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	3:41:38 PM	Tube furnace set to 0
4/4/2011	4:14:36 PM	Helium valve closed
4/4/2011	4:14:36 PM	H2 valve closed
4/4/2011	4:14:36 PM	BCl3 valve closed
4/4/2011	4:14:36 PM	PH3 valve closed
4/4/2011	4:14:36 PM	SiCl4 pre valve closed
4/4/2011	4:14:36 PM	SiCl4 post valve closed
4/4/2011	4:14:36 PM	Main Vac valve closed
4/4/2011	4:14:36 PM	Bypass valve closed
4/4/2011	4:14:36 PM	Bubbler valve closed
4/4/2011	4:14:36 PM	Helium MFC set to  0.000000
4/4/2011	4:14:36 PM	H2 MFC set to  0.000000
4/4/2011	4:14:36 PM	BCl3 MFC set to  0.000000
4/4/2011	4:14:36 PM	PHl3 MFC set to  0.000000
4/4/2011	4:14:36 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:14:36 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:14:36 PM	Tube furnace set to 0
4/4/2011	4:14:37 PM	Run finished at 4:14 PM
4/4/2011	4:34:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2011	4:34:07 PM	Recipe started at 4:34 PM
4/4/2011	4:34:07 PM	Helium valve closed
4/4/2011	4:34:07 PM	H2 valve closed
4/4/2011	4:34:07 PM	BCl3 valve closed
4/4/2011	4:34:07 PM	PH3 valve closed
4/4/2011	4:34:07 PM	SiCl4 pre valve closed
4/4/2011	4:34:07 PM	SiCl4 post valve closed
4/4/2011	4:34:07 PM	Main Vac valve closed
4/4/2011	4:34:07 PM	Bubbler valve closed
4/4/2011	4:34:07 PM	Bypass valve opened
4/4/2011	4:34:07 PM	Helium MFC set to  0.000000
4/4/2011	4:34:07 PM	H2 MFC set to  0.000000
4/4/2011	4:34:07 PM	BCl3 MFC set to  0.000000
4/4/2011	4:34:07 PM	PHl3 MFC set to  0.000000
4/4/2011	4:34:07 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:34:07 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:34:07 PM	Tube furnace set to 0
4/4/2011	4:34:39 PM	Helium valve closed
4/4/2011	4:34:39 PM	H2 valve closed
4/4/2011	4:34:39 PM	BCl3 valve closed
4/4/2011	4:34:39 PM	PH3 valve closed
4/4/2011	4:34:39 PM	SiCl4 pre valve closed
4/4/2011	4:34:39 PM	SiCl4 post valve closed
4/4/2011	4:34:39 PM	Bubbler valve closed
4/4/2011	4:34:39 PM	Main Vac valve opened
4/4/2011	4:34:39 PM	Bypass valve opened
4/4/2011	4:34:39 PM	Helium MFC set to  0.000000
4/4/2011	4:34:39 PM	H2 MFC set to  0.000000
4/4/2011	4:34:39 PM	BCl3 MFC set to  0.000000
4/4/2011	4:34:39 PM	PHl3 MFC set to  0.000000
4/4/2011	4:34:39 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:34:39 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:34:40 PM	Tube furnace set to 0
4/4/2011	4:34:40 PM	Run finished at 4:34 PM
4/4/2011	4:34:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2011	4:34:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/4/2011	4:34:55 PM	Recipe started at 4:34 PM
4/4/2011	4:34:55 PM	H2 valve closed
4/4/2011	4:34:55 PM	BCl3 valve closed
4/4/2011	4:34:55 PM	PH3 valve closed
4/4/2011	4:34:55 PM	SiCl4 pre valve closed
4/4/2011	4:34:55 PM	SiCl4 post valve closed
4/4/2011	4:34:55 PM	Main Vac valve closed
4/4/2011	4:34:55 PM	Bypass valve closed
4/4/2011	4:34:55 PM	Bubbler valve closed
4/4/2011	4:34:55 PM	Helium valve opened
4/4/2011	4:34:55 PM	Helium MFC set to  500.000000
4/4/2011	4:34:55 PM	H2 MFC set to  0.000000
4/4/2011	4:34:55 PM	BCl3 MFC set to  0.000000
4/4/2011	4:34:55 PM	PHl3 MFC set to  0.000000
4/4/2011	4:34:55 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:34:55 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:34:55 PM	Tube furnace set to 0
4/4/2011	4:36:13 PM	Helium valve closed
4/4/2011	4:36:13 PM	H2 valve closed
4/4/2011	4:36:13 PM	BCl3 valve closed
4/4/2011	4:36:13 PM	PH3 valve closed
4/4/2011	4:36:13 PM	SiCl4 pre valve closed
4/4/2011	4:36:13 PM	SiCl4 post valve closed
4/4/2011	4:36:13 PM	Main Vac valve closed
4/4/2011	4:36:14 PM	Bypass valve closed
4/4/2011	4:36:14 PM	Bubbler valve closed
4/4/2011	4:36:14 PM	Helium MFC set to  0.000000
4/4/2011	4:36:14 PM	H2 MFC set to  0.000000
4/4/2011	4:36:14 PM	BCl3 MFC set to  0.000000
4/4/2011	4:36:14 PM	PHl3 MFC set to  0.000000
4/4/2011	4:36:14 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:36:14 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:36:14 PM	Tube furnace set to 0
4/4/2011	4:36:14 PM	Run finished at 4:36 PM
4/4/2011	4:36:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/4/2011	4:40:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2011	4:40:06 PM	Recipe started at 4:40 PM
4/4/2011	4:40:06 PM	Helium valve closed
4/4/2011	4:40:06 PM	H2 valve closed
4/4/2011	4:40:06 PM	BCl3 valve closed
4/4/2011	4:40:06 PM	PH3 valve closed
4/4/2011	4:40:06 PM	SiCl4 pre valve closed
4/4/2011	4:40:06 PM	SiCl4 post valve closed
4/4/2011	4:40:06 PM	Main Vac valve closed
4/4/2011	4:40:06 PM	Bubbler valve closed
4/4/2011	4:40:06 PM	Bypass valve opened
4/4/2011	4:40:06 PM	Helium MFC set to  0.000000
4/4/2011	4:40:06 PM	H2 MFC set to  0.000000
4/4/2011	4:40:06 PM	BCl3 MFC set to  0.000000
4/4/2011	4:40:06 PM	PHl3 MFC set to  0.000000
4/4/2011	4:40:06 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:40:06 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:40:06 PM	Tube furnace set to 0
4/4/2011	4:40:36 PM	Helium valve closed
4/4/2011	4:40:36 PM	H2 valve closed
4/4/2011	4:40:36 PM	BCl3 valve closed
4/4/2011	4:40:36 PM	PH3 valve closed
4/4/2011	4:40:36 PM	SiCl4 pre valve closed
4/4/2011	4:40:36 PM	SiCl4 post valve closed
4/4/2011	4:40:36 PM	Bubbler valve closed
4/4/2011	4:40:36 PM	Main Vac valve opened
4/4/2011	4:40:36 PM	Bypass valve opened
4/4/2011	4:40:36 PM	Helium MFC set to  0.000000
4/4/2011	4:40:36 PM	H2 MFC set to  0.000000
4/4/2011	4:40:36 PM	BCl3 MFC set to  0.000000
4/4/2011	4:40:36 PM	PHl3 MFC set to  0.000000
4/4/2011	4:40:36 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:40:36 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:40:36 PM	Tube furnace set to 0
4/4/2011	4:40:37 PM	Run finished at 4:40 PM
4/4/2011	4:40:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2011	4:40:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/4/2011	4:40:52 PM	Recipe started at 4:40 PM
4/4/2011	4:40:52 PM	Helium valve closed
4/4/2011	4:40:52 PM	H2 valve closed
4/4/2011	4:40:52 PM	BCl3 valve closed
4/4/2011	4:40:52 PM	PH3 valve closed
4/4/2011	4:40:52 PM	SiCl4 pre valve closed
4/4/2011	4:40:52 PM	SiCl4 post valve closed
4/4/2011	4:40:52 PM	Main Vac valve closed
4/4/2011	4:40:52 PM	Bubbler valve closed
4/4/2011	4:40:52 PM	Bypass valve opened
4/4/2011	4:40:52 PM	Helium MFC set to  0.000000
4/4/2011	4:40:52 PM	H2 MFC set to  0.000000
4/4/2011	4:40:52 PM	BCl3 MFC set to  0.000000
4/4/2011	4:40:52 PM	PHl3 MFC set to  0.000000
4/4/2011	4:40:52 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:40:52 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:40:52 PM	Tube furnace set to 0
4/4/2011	4:40:52 PM	Helium valve closed
4/4/2011	4:40:52 PM	H2 valve closed
4/4/2011	4:40:52 PM	BCl3 valve closed
4/4/2011	4:40:52 PM	PH3 valve closed
4/4/2011	4:40:52 PM	SiCl4 pre valve closed
4/4/2011	4:40:52 PM	SiCl4 post valve closed
4/4/2011	4:40:52 PM	Bubbler valve closed
4/4/2011	4:40:52 PM	Main Vac valve opened
4/4/2011	4:40:52 PM	Bypass valve opened
4/4/2011	4:40:52 PM	Helium MFC set to  0.000000
4/4/2011	4:40:52 PM	H2 MFC set to  0.000000
4/4/2011	4:40:52 PM	BCl3 MFC set to  0.000000
4/4/2011	4:40:52 PM	PHl3 MFC set to  0.000000
4/4/2011	4:40:52 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:40:52 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:40:52 PM	Tube furnace set to 0
4/4/2011	4:41:53 PM	H2 valve closed
4/4/2011	4:41:53 PM	BCl3 valve closed
4/4/2011	4:41:53 PM	PH3 valve closed
4/4/2011	4:41:53 PM	SiCl4 pre valve closed
4/4/2011	4:41:53 PM	SiCl4 post valve closed
4/4/2011	4:41:53 PM	Bubbler valve closed
4/4/2011	4:41:53 PM	Helium valve opened
4/4/2011	4:41:53 PM	Main Vac valve opened
4/4/2011	4:41:53 PM	Bypass valve opened
4/4/2011	4:41:53 PM	Helium MFC set to  100.000000
4/4/2011	4:41:53 PM	H2 MFC set to  0.000000
4/4/2011	4:41:53 PM	BCl3 MFC set to  0.000000
4/4/2011	4:41:53 PM	PHl3 MFC set to  0.000000
4/4/2011	4:41:53 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:41:53 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:41:53 PM	Tube furnace set to 0
4/4/2011	4:42:53 PM	Helium valve closed
4/4/2011	4:42:53 PM	H2 valve closed
4/4/2011	4:42:53 PM	BCl3 valve closed
4/4/2011	4:42:53 PM	PH3 valve closed
4/4/2011	4:42:53 PM	SiCl4 pre valve closed
4/4/2011	4:42:53 PM	SiCl4 post valve closed
4/4/2011	4:42:53 PM	Bubbler valve closed
4/4/2011	4:42:53 PM	Main Vac valve opened
4/4/2011	4:42:53 PM	Bypass valve opened
4/4/2011	4:42:53 PM	Helium MFC set to  0.000000
4/4/2011	4:42:53 PM	H2 MFC set to  0.000000
4/4/2011	4:42:53 PM	BCl3 MFC set to  0.000000
4/4/2011	4:42:53 PM	PHl3 MFC set to  0.000000
4/4/2011	4:42:53 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:42:53 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:42:53 PM	Tube furnace set to 0
4/4/2011	4:43:53 PM	H2 valve closed
4/4/2011	4:43:53 PM	BCl3 valve closed
4/4/2011	4:43:53 PM	PH3 valve closed
4/4/2011	4:43:53 PM	SiCl4 pre valve closed
4/4/2011	4:43:53 PM	SiCl4 post valve closed
4/4/2011	4:43:53 PM	Bubbler valve closed
4/4/2011	4:43:53 PM	Helium valve opened
4/4/2011	4:43:53 PM	Main Vac valve opened
4/4/2011	4:43:53 PM	Bypass valve opened
4/4/2011	4:43:53 PM	Helium MFC set to  100.000000
4/4/2011	4:43:53 PM	H2 MFC set to  0.000000
4/4/2011	4:43:53 PM	BCl3 MFC set to  0.000000
4/4/2011	4:43:53 PM	PHl3 MFC set to  0.000000
4/4/2011	4:43:53 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:43:53 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:43:53 PM	Tube furnace set to 0
4/4/2011	4:44:53 PM	Helium valve closed
4/4/2011	4:44:53 PM	H2 valve closed
4/4/2011	4:44:53 PM	BCl3 valve closed
4/4/2011	4:44:53 PM	PH3 valve closed
4/4/2011	4:44:53 PM	SiCl4 pre valve closed
4/4/2011	4:44:53 PM	SiCl4 post valve closed
4/4/2011	4:44:53 PM	Bubbler valve closed
4/4/2011	4:44:53 PM	Main Vac valve opened
4/4/2011	4:44:53 PM	Bypass valve opened
4/4/2011	4:44:53 PM	Helium MFC set to  0.000000
4/4/2011	4:44:53 PM	H2 MFC set to  0.000000
4/4/2011	4:44:53 PM	BCl3 MFC set to  0.000000
4/4/2011	4:44:53 PM	PHl3 MFC set to  0.000000
4/4/2011	4:44:53 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:44:53 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:44:53 PM	Tube furnace set to 0
4/4/2011	4:45:53 PM	H2 valve closed
4/4/2011	4:45:53 PM	BCl3 valve closed
4/4/2011	4:45:53 PM	PH3 valve closed
4/4/2011	4:45:53 PM	SiCl4 pre valve closed
4/4/2011	4:45:53 PM	SiCl4 post valve closed
4/4/2011	4:45:53 PM	Bubbler valve closed
4/4/2011	4:45:53 PM	Helium valve opened
4/4/2011	4:45:53 PM	Main Vac valve opened
4/4/2011	4:45:53 PM	Bypass valve opened
4/4/2011	4:45:53 PM	Helium MFC set to  100.000000
4/4/2011	4:45:53 PM	H2 MFC set to  0.000000
4/4/2011	4:45:53 PM	BCl3 MFC set to  0.000000
4/4/2011	4:45:53 PM	PHl3 MFC set to  0.000000
4/4/2011	4:45:53 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:45:53 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:45:53 PM	Tube furnace set to 0
4/4/2011	4:46:53 PM	Helium valve closed
4/4/2011	4:46:54 PM	H2 valve closed
4/4/2011	4:46:54 PM	BCl3 valve closed
4/4/2011	4:46:54 PM	PH3 valve closed
4/4/2011	4:46:54 PM	SiCl4 pre valve closed
4/4/2011	4:46:54 PM	SiCl4 post valve closed
4/4/2011	4:46:54 PM	Bubbler valve closed
4/4/2011	4:46:54 PM	Main Vac valve opened
4/4/2011	4:46:54 PM	Bypass valve opened
4/4/2011	4:46:54 PM	Helium MFC set to  0.000000
4/4/2011	4:46:54 PM	H2 MFC set to  0.000000
4/4/2011	4:46:54 PM	BCl3 MFC set to  0.000000
4/4/2011	4:46:54 PM	PHl3 MFC set to  0.000000
4/4/2011	4:46:54 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:46:54 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:46:54 PM	Tube furnace set to 0
4/4/2011	4:47:54 PM	H2 valve closed
4/4/2011	4:47:54 PM	BCl3 valve closed
4/4/2011	4:47:54 PM	PH3 valve closed
4/4/2011	4:47:54 PM	SiCl4 pre valve closed
4/4/2011	4:47:54 PM	SiCl4 post valve closed
4/4/2011	4:47:54 PM	Bubbler valve closed
4/4/2011	4:47:54 PM	Helium valve opened
4/4/2011	4:47:54 PM	Main Vac valve opened
4/4/2011	4:47:54 PM	Bypass valve opened
4/4/2011	4:47:54 PM	Helium MFC set to  100.000000
4/4/2011	4:47:54 PM	H2 MFC set to  0.000000
4/4/2011	4:47:54 PM	BCl3 MFC set to  0.000000
4/4/2011	4:47:54 PM	PHl3 MFC set to  0.000000
4/4/2011	4:47:54 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:47:54 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:47:54 PM	Tube furnace set to 0
4/4/2011	4:48:54 PM	Helium valve closed
4/4/2011	4:48:54 PM	H2 valve closed
4/4/2011	4:48:54 PM	BCl3 valve closed
4/4/2011	4:48:54 PM	PH3 valve closed
4/4/2011	4:48:54 PM	SiCl4 pre valve closed
4/4/2011	4:48:54 PM	SiCl4 post valve closed
4/4/2011	4:48:54 PM	Bubbler valve closed
4/4/2011	4:48:54 PM	Main Vac valve opened
4/4/2011	4:48:54 PM	Bypass valve opened
4/4/2011	4:48:54 PM	Helium MFC set to  0.000000
4/4/2011	4:48:54 PM	H2 MFC set to  0.000000
4/4/2011	4:48:54 PM	BCl3 MFC set to  0.000000
4/4/2011	4:48:54 PM	PHl3 MFC set to  0.000000
4/4/2011	4:48:54 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:48:54 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:48:54 PM	Tube furnace set to 0
4/4/2011	4:49:54 PM	H2 valve closed
4/4/2011	4:49:54 PM	BCl3 valve closed
4/4/2011	4:49:54 PM	PH3 valve closed
4/4/2011	4:49:54 PM	SiCl4 pre valve closed
4/4/2011	4:49:54 PM	SiCl4 post valve closed
4/4/2011	4:49:54 PM	Bubbler valve closed
4/4/2011	4:49:54 PM	Helium valve opened
4/4/2011	4:49:54 PM	Main Vac valve opened
4/4/2011	4:49:54 PM	Bypass valve opened
4/4/2011	4:49:54 PM	Helium MFC set to  100.000000
4/4/2011	4:49:54 PM	H2 MFC set to  0.000000
4/4/2011	4:49:54 PM	BCl3 MFC set to  0.000000
4/4/2011	4:49:54 PM	PHl3 MFC set to  0.000000
4/4/2011	4:49:54 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:49:54 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:49:54 PM	Tube furnace set to 0
4/4/2011	4:50:54 PM	Helium valve closed
4/4/2011	4:50:54 PM	H2 valve closed
4/4/2011	4:50:54 PM	BCl3 valve closed
4/4/2011	4:50:54 PM	PH3 valve closed
4/4/2011	4:50:54 PM	SiCl4 pre valve closed
4/4/2011	4:50:54 PM	SiCl4 post valve closed
4/4/2011	4:50:54 PM	Bubbler valve closed
4/4/2011	4:50:54 PM	Main Vac valve opened
4/4/2011	4:50:54 PM	Bypass valve opened
4/4/2011	4:50:54 PM	Helium MFC set to  0.000000
4/4/2011	4:50:54 PM	H2 MFC set to  0.000000
4/4/2011	4:50:54 PM	BCl3 MFC set to  0.000000
4/4/2011	4:50:54 PM	PHl3 MFC set to  0.000000
4/4/2011	4:50:54 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:50:54 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:50:54 PM	Tube furnace set to 0
4/4/2011	4:51:54 PM	H2 valve closed
4/4/2011	4:51:54 PM	BCl3 valve closed
4/4/2011	4:51:54 PM	PH3 valve closed
4/4/2011	4:51:54 PM	SiCl4 pre valve closed
4/4/2011	4:51:54 PM	SiCl4 post valve closed
4/4/2011	4:51:54 PM	Bubbler valve closed
4/4/2011	4:51:54 PM	Helium valve opened
4/4/2011	4:51:54 PM	Main Vac valve opened
4/4/2011	4:51:54 PM	Bypass valve opened
4/4/2011	4:51:54 PM	Helium MFC set to  100.000000
4/4/2011	4:51:54 PM	H2 MFC set to  0.000000
4/4/2011	4:51:54 PM	BCl3 MFC set to  0.000000
4/4/2011	4:51:54 PM	PHl3 MFC set to  0.000000
4/4/2011	4:51:54 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:51:54 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:51:55 PM	Tube furnace set to 0
4/4/2011	4:52:55 PM	Helium valve closed
4/4/2011	4:52:55 PM	H2 valve closed
4/4/2011	4:52:55 PM	BCl3 valve closed
4/4/2011	4:52:55 PM	PH3 valve closed
4/4/2011	4:52:55 PM	SiCl4 pre valve closed
4/4/2011	4:52:55 PM	SiCl4 post valve closed
4/4/2011	4:52:55 PM	Bubbler valve closed
4/4/2011	4:52:55 PM	Main Vac valve opened
4/4/2011	4:52:55 PM	Bypass valve opened
4/4/2011	4:52:55 PM	Helium MFC set to  0.000000
4/4/2011	4:52:55 PM	H2 MFC set to  0.000000
4/4/2011	4:52:55 PM	BCl3 MFC set to  0.000000
4/4/2011	4:52:55 PM	PHl3 MFC set to  0.000000
4/4/2011	4:52:55 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:52:55 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:52:55 PM	Tube furnace set to 0
4/4/2011	4:53:55 PM	H2 valve closed
4/4/2011	4:53:55 PM	BCl3 valve closed
4/4/2011	4:53:55 PM	PH3 valve closed
4/4/2011	4:53:55 PM	SiCl4 pre valve closed
4/4/2011	4:53:55 PM	SiCl4 post valve closed
4/4/2011	4:53:55 PM	Bubbler valve closed
4/4/2011	4:53:55 PM	Helium valve opened
4/4/2011	4:53:55 PM	Main Vac valve opened
4/4/2011	4:53:55 PM	Bypass valve opened
4/4/2011	4:53:55 PM	Helium MFC set to  100.000000
4/4/2011	4:53:55 PM	H2 MFC set to  0.000000
4/4/2011	4:53:55 PM	BCl3 MFC set to  0.000000
4/4/2011	4:53:55 PM	PHl3 MFC set to  0.000000
4/4/2011	4:53:55 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:53:55 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:53:55 PM	Tube furnace set to 0
4/4/2011	4:54:55 PM	Helium valve closed
4/4/2011	4:54:55 PM	H2 valve closed
4/4/2011	4:54:55 PM	BCl3 valve closed
4/4/2011	4:54:55 PM	PH3 valve closed
4/4/2011	4:54:55 PM	SiCl4 pre valve closed
4/4/2011	4:54:55 PM	SiCl4 post valve closed
4/4/2011	4:54:55 PM	Bubbler valve closed
4/4/2011	4:54:55 PM	Main Vac valve opened
4/4/2011	4:54:55 PM	Bypass valve opened
4/4/2011	4:54:55 PM	Helium MFC set to  0.000000
4/4/2011	4:54:55 PM	H2 MFC set to  0.000000
4/4/2011	4:54:55 PM	BCl3 MFC set to  0.000000
4/4/2011	4:54:55 PM	PHl3 MFC set to  0.000000
4/4/2011	4:54:55 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:54:55 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:54:55 PM	Tube furnace set to 0
4/4/2011	4:55:55 PM	H2 valve closed
4/4/2011	4:55:55 PM	BCl3 valve closed
4/4/2011	4:55:55 PM	PH3 valve closed
4/4/2011	4:55:55 PM	SiCl4 pre valve closed
4/4/2011	4:55:55 PM	SiCl4 post valve closed
4/4/2011	4:55:55 PM	Bubbler valve closed
4/4/2011	4:55:55 PM	Helium valve opened
4/4/2011	4:55:55 PM	Main Vac valve opened
4/4/2011	4:55:55 PM	Bypass valve opened
4/4/2011	4:55:55 PM	Helium MFC set to  100.000000
4/4/2011	4:55:55 PM	H2 MFC set to  0.000000
4/4/2011	4:55:55 PM	BCl3 MFC set to  0.000000
4/4/2011	4:55:55 PM	PHl3 MFC set to  0.000000
4/4/2011	4:55:55 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:55:55 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:55:55 PM	Tube furnace set to 0
4/4/2011	4:56:55 PM	Helium valve closed
4/4/2011	4:56:55 PM	H2 valve closed
4/4/2011	4:56:55 PM	BCl3 valve closed
4/4/2011	4:56:55 PM	PH3 valve closed
4/4/2011	4:56:55 PM	SiCl4 pre valve closed
4/4/2011	4:56:55 PM	SiCl4 post valve closed
4/4/2011	4:56:55 PM	Bubbler valve closed
4/4/2011	4:56:55 PM	Main Vac valve opened
4/4/2011	4:56:55 PM	Bypass valve opened
4/4/2011	4:56:55 PM	Helium MFC set to  0.000000
4/4/2011	4:56:55 PM	H2 MFC set to  0.000000
4/4/2011	4:56:55 PM	BCl3 MFC set to  0.000000
4/4/2011	4:56:55 PM	PHl3 MFC set to  0.000000
4/4/2011	4:56:55 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:56:55 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:56:56 PM	Tube furnace set to 0
4/4/2011	4:57:56 PM	H2 valve closed
4/4/2011	4:57:56 PM	BCl3 valve closed
4/4/2011	4:57:56 PM	PH3 valve closed
4/4/2011	4:57:56 PM	SiCl4 pre valve closed
4/4/2011	4:57:56 PM	SiCl4 post valve closed
4/4/2011	4:57:56 PM	Bubbler valve closed
4/4/2011	4:57:56 PM	Helium valve opened
4/4/2011	4:57:56 PM	Main Vac valve opened
4/4/2011	4:57:56 PM	Bypass valve opened
4/4/2011	4:57:56 PM	Helium MFC set to  100.000000
4/4/2011	4:57:56 PM	H2 MFC set to  0.000000
4/4/2011	4:57:56 PM	BCl3 MFC set to  0.000000
4/4/2011	4:57:56 PM	PHl3 MFC set to  0.000000
4/4/2011	4:57:56 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:57:56 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:57:56 PM	Tube furnace set to 0
4/4/2011	4:58:56 PM	Helium valve closed
4/4/2011	4:58:56 PM	H2 valve closed
4/4/2011	4:58:56 PM	BCl3 valve closed
4/4/2011	4:58:56 PM	PH3 valve closed
4/4/2011	4:58:56 PM	SiCl4 pre valve closed
4/4/2011	4:58:56 PM	SiCl4 post valve closed
4/4/2011	4:58:56 PM	Bubbler valve closed
4/4/2011	4:58:56 PM	Main Vac valve opened
4/4/2011	4:58:56 PM	Bypass valve opened
4/4/2011	4:58:56 PM	Helium MFC set to  0.000000
4/4/2011	4:58:56 PM	H2 MFC set to  0.000000
4/4/2011	4:58:56 PM	BCl3 MFC set to  0.000000
4/4/2011	4:58:56 PM	PHl3 MFC set to  0.000000
4/4/2011	4:58:56 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:58:56 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:58:56 PM	Tube furnace set to 0
4/4/2011	4:59:56 PM	H2 valve closed
4/4/2011	4:59:56 PM	BCl3 valve closed
4/4/2011	4:59:56 PM	PH3 valve closed
4/4/2011	4:59:56 PM	SiCl4 pre valve closed
4/4/2011	4:59:56 PM	SiCl4 post valve closed
4/4/2011	4:59:56 PM	Bubbler valve closed
4/4/2011	4:59:56 PM	Helium valve opened
4/4/2011	4:59:56 PM	Main Vac valve opened
4/4/2011	4:59:56 PM	Bypass valve opened
4/4/2011	4:59:56 PM	Helium MFC set to  100.000000
4/4/2011	4:59:56 PM	H2 MFC set to  0.000000
4/4/2011	4:59:56 PM	BCl3 MFC set to  0.000000
4/4/2011	4:59:56 PM	PHl3 MFC set to  0.000000
4/4/2011	4:59:56 PM	SiCl4 MFC set to  0.000000
4/4/2011	4:59:56 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	4:59:56 PM	Tube furnace set to 0
4/4/2011	5:00:56 PM	Helium valve closed
4/4/2011	5:00:56 PM	H2 valve closed
4/4/2011	5:00:56 PM	BCl3 valve closed
4/4/2011	5:00:56 PM	PH3 valve closed
4/4/2011	5:00:56 PM	SiCl4 pre valve closed
4/4/2011	5:00:56 PM	SiCl4 post valve closed
4/4/2011	5:00:56 PM	Bubbler valve closed
4/4/2011	5:00:56 PM	Main Vac valve opened
4/4/2011	5:00:56 PM	Bypass valve opened
4/4/2011	5:00:56 PM	Helium MFC set to  0.000000
4/4/2011	5:00:56 PM	H2 MFC set to  0.000000
4/4/2011	5:00:56 PM	BCl3 MFC set to  0.000000
4/4/2011	5:00:56 PM	PHl3 MFC set to  0.000000
4/4/2011	5:00:56 PM	SiCl4 MFC set to  0.000000
4/4/2011	5:00:56 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	5:00:56 PM	Tube furnace set to 0
4/4/2011	5:00:57 PM	Run finished at 5:00 PM
4/4/2011	5:00:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/4/2011	5:27:42 PM	Helium MFC set to  40.000000
4/4/2011	5:27:43 PM	Helium valve opened
4/4/2011	5:28:03 PM	Helium valve closed
4/4/2011	5:28:57 PM	Helium MFC set to  100.000000
4/4/2011	5:28:58 PM	Helium valve opened
4/4/2011	5:29:11 PM	Helium valve closed
4/4/2011	5:30:11 PM	Recipe started at 5:30 PM
4/4/2011	5:30:11 PM	Helium valve closed
4/4/2011	5:30:11 PM	BCl3 valve closed
4/4/2011	5:30:11 PM	PH3 valve closed
4/4/2011	5:30:11 PM	SiCl4 pre valve closed
4/4/2011	5:30:11 PM	SiCl4 post valve closed
4/4/2011	5:30:11 PM	Main Vac valve closed
4/4/2011	5:30:11 PM	Bypass valve closed
4/4/2011	5:30:11 PM	Bubbler valve closed
4/4/2011	5:30:11 PM	H2 valve opened
4/4/2011	5:30:11 PM	Helium MFC set to  0.000000
4/4/2011	5:30:11 PM	H2 MFC set to  500.000000
4/4/2011	5:30:11 PM	BCl3 MFC set to  0.000000
4/4/2011	5:30:11 PM	PHl3 MFC set to  0.000000
4/4/2011	5:30:11 PM	SiCl4 MFC set to  0.000000
4/4/2011	5:30:11 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	5:30:11 PM	Tube furnace set to 0
4/4/2011	5:31:33 PM	Helium valve closed
4/4/2011	5:31:33 PM	BCl3 valve closed
4/4/2011	5:31:33 PM	PH3 valve closed
4/4/2011	5:31:33 PM	SiCl4 pre valve closed
4/4/2011	5:31:33 PM	SiCl4 post valve closed
4/4/2011	5:31:33 PM	Main Vac valve closed
4/4/2011	5:31:33 PM	Bypass valve closed
4/4/2011	5:31:33 PM	H2 valve opened
4/4/2011	5:31:33 PM	Bubbler valve opened
4/4/2011	5:31:33 PM	Helium MFC set to  0.000000
4/4/2011	5:31:33 PM	H2 MFC set to  500.000000
4/4/2011	5:31:33 PM	BCl3 MFC set to  0.000000
4/4/2011	5:31:33 PM	PHl3 MFC set to  0.000000
4/4/2011	5:31:33 PM	SiCl4 MFC set to  0.000000
4/4/2011	5:31:33 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	5:31:34 PM	Tube furnace set to 1000
4/4/2011	5:51:34 PM	Helium valve closed
4/4/2011	5:51:34 PM	BCl3 valve closed
4/4/2011	5:51:34 PM	PH3 valve closed
4/4/2011	5:51:34 PM	Main Vac valve closed
4/4/2011	5:51:34 PM	Bypass valve closed
4/4/2011	5:51:34 PM	H2 valve opened
4/4/2011	5:51:34 PM	SiCl4 pre valve opened
4/4/2011	5:51:34 PM	SiCl4 post valve opened
4/4/2011	5:51:34 PM	Bubbler valve opened
4/4/2011	5:51:34 PM	Helium MFC set to  0.000000
4/4/2011	5:51:34 PM	H2 MFC set to  500.000000
4/4/2011	5:51:34 PM	BCl3 MFC set to  0.000000
4/4/2011	5:51:34 PM	PHl3 MFC set to  0.000000
4/4/2011	5:51:34 PM	SiCl4 MFC set to  70.000000
4/4/2011	5:51:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	5:51:34 PM	Tube furnace set to 1000
4/4/2011	6:21:34 PM	H2 valve closed
4/4/2011	6:21:34 PM	BCl3 valve closed
4/4/2011	6:21:34 PM	PH3 valve closed
4/4/2011	6:21:34 PM	SiCl4 pre valve closed
4/4/2011	6:21:34 PM	SiCl4 post valve closed
4/4/2011	6:21:34 PM	Main Vac valve closed
4/4/2011	6:21:34 PM	Bypass valve closed
4/4/2011	6:21:34 PM	Helium valve opened
4/4/2011	6:21:34 PM	Bubbler valve opened
4/4/2011	6:21:34 PM	Helium MFC set to  500.000000
4/4/2011	6:21:34 PM	H2 MFC set to  0.000000
4/4/2011	6:21:34 PM	BCl3 MFC set to  0.000000
4/4/2011	6:21:34 PM	PHl3 MFC set to  0.000000
4/4/2011	6:21:34 PM	SiCl4 MFC set to  0.000000
4/4/2011	6:21:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	6:21:34 PM	Tube furnace set to 0
4/4/2011	6:40:14 PM	H2 valve closed
4/4/2011	6:40:14 PM	BCl3 valve closed
4/4/2011	6:40:14 PM	PH3 valve closed
4/4/2011	6:40:14 PM	SiCl4 pre valve closed
4/4/2011	6:40:14 PM	SiCl4 post valve closed
4/4/2011	6:40:14 PM	Main Vac valve closed
4/4/2011	6:40:14 PM	Bypass valve closed
4/4/2011	6:40:14 PM	Helium valve opened
4/4/2011	6:40:14 PM	Bubbler valve opened
4/4/2011	6:40:14 PM	Helium MFC set to  500.000000
4/4/2011	6:40:14 PM	H2 MFC set to  0.000000
4/4/2011	6:40:14 PM	BCl3 MFC set to  0.000000
4/4/2011	6:40:14 PM	PHl3 MFC set to  0.000000
4/4/2011	6:40:14 PM	SiCl4 MFC set to  0.000000
4/4/2011	6:40:14 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	6:40:14 PM	Tube furnace set to 0
4/4/2011	7:13:34 PM	Helium valve closed
4/4/2011	7:13:34 PM	H2 valve closed
4/4/2011	7:13:34 PM	BCl3 valve closed
4/4/2011	7:13:34 PM	PH3 valve closed
4/4/2011	7:13:34 PM	SiCl4 pre valve closed
4/4/2011	7:13:34 PM	SiCl4 post valve closed
4/4/2011	7:13:34 PM	Main Vac valve closed
4/4/2011	7:13:34 PM	Bypass valve closed
4/4/2011	7:13:34 PM	Bubbler valve closed
4/4/2011	7:13:34 PM	Helium MFC set to  0.000000
4/4/2011	7:13:34 PM	H2 MFC set to  0.000000
4/4/2011	7:13:34 PM	BCl3 MFC set to  0.000000
4/4/2011	7:13:34 PM	PHl3 MFC set to  0.000000
4/4/2011	7:13:34 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:13:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:13:34 PM	Tube furnace set to 0
4/4/2011	7:13:34 PM	Run finished at 7:13 PM
4/4/2011	7:31:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2011	7:31:50 PM	Recipe started at 7:31 PM
4/4/2011	7:31:50 PM	Helium valve closed
4/4/2011	7:31:50 PM	H2 valve closed
4/4/2011	7:31:50 PM	BCl3 valve closed
4/4/2011	7:31:50 PM	PH3 valve closed
4/4/2011	7:31:50 PM	SiCl4 pre valve closed
4/4/2011	7:31:50 PM	SiCl4 post valve closed
4/4/2011	7:31:50 PM	Main Vac valve closed
4/4/2011	7:31:50 PM	Bubbler valve closed
4/4/2011	7:31:50 PM	Bypass valve opened
4/4/2011	7:31:50 PM	Helium MFC set to  0.000000
4/4/2011	7:31:50 PM	H2 MFC set to  0.000000
4/4/2011	7:31:50 PM	BCl3 MFC set to  0.000000
4/4/2011	7:31:50 PM	PHl3 MFC set to  0.000000
4/4/2011	7:31:50 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:31:50 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:31:50 PM	Tube furnace set to 0
4/4/2011	7:32:22 PM	Helium valve closed
4/4/2011	7:32:22 PM	H2 valve closed
4/4/2011	7:32:22 PM	BCl3 valve closed
4/4/2011	7:32:22 PM	PH3 valve closed
4/4/2011	7:32:22 PM	SiCl4 pre valve closed
4/4/2011	7:32:22 PM	SiCl4 post valve closed
4/4/2011	7:32:22 PM	Bubbler valve closed
4/4/2011	7:32:22 PM	Main Vac valve opened
4/4/2011	7:32:22 PM	Bypass valve opened
4/4/2011	7:32:22 PM	Helium MFC set to  0.000000
4/4/2011	7:32:22 PM	H2 MFC set to  0.000000
4/4/2011	7:32:22 PM	BCl3 MFC set to  0.000000
4/4/2011	7:32:22 PM	PHl3 MFC set to  0.000000
4/4/2011	7:32:22 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:32:22 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:32:22 PM	Tube furnace set to 0
4/4/2011	7:32:23 PM	Run finished at 7:32 PM
4/4/2011	7:32:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2011	7:32:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/4/2011	7:32:46 PM	Recipe started at 7:32 PM
4/4/2011	7:32:46 PM	Helium valve closed
4/4/2011	7:32:46 PM	H2 valve closed
4/4/2011	7:32:46 PM	BCl3 valve closed
4/4/2011	7:32:46 PM	PH3 valve closed
4/4/2011	7:32:46 PM	SiCl4 pre valve closed
4/4/2011	7:32:46 PM	SiCl4 post valve closed
4/4/2011	7:32:46 PM	Main Vac valve closed
4/4/2011	7:32:46 PM	Bubbler valve closed
4/4/2011	7:32:46 PM	Bypass valve opened
4/4/2011	7:32:46 PM	Helium MFC set to  0.000000
4/4/2011	7:32:46 PM	H2 MFC set to  0.000000
4/4/2011	7:32:46 PM	BCl3 MFC set to  0.000000
4/4/2011	7:32:46 PM	PHl3 MFC set to  0.000000
4/4/2011	7:32:46 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:32:46 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:32:46 PM	Tube furnace set to 0
4/4/2011	7:32:46 PM	Helium valve closed
4/4/2011	7:32:46 PM	H2 valve closed
4/4/2011	7:32:46 PM	BCl3 valve closed
4/4/2011	7:32:46 PM	PH3 valve closed
4/4/2011	7:32:46 PM	SiCl4 pre valve closed
4/4/2011	7:32:46 PM	SiCl4 post valve closed
4/4/2011	7:32:46 PM	Bubbler valve closed
4/4/2011	7:32:46 PM	Main Vac valve opened
4/4/2011	7:32:46 PM	Bypass valve opened
4/4/2011	7:32:46 PM	Helium MFC set to  0.000000
4/4/2011	7:32:46 PM	H2 MFC set to  0.000000
4/4/2011	7:32:46 PM	BCl3 MFC set to  0.000000
4/4/2011	7:32:46 PM	PHl3 MFC set to  0.000000
4/4/2011	7:32:46 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:32:46 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:32:47 PM	Tube furnace set to 0
4/4/2011	7:33:47 PM	H2 valve closed
4/4/2011	7:33:47 PM	BCl3 valve closed
4/4/2011	7:33:47 PM	PH3 valve closed
4/4/2011	7:33:47 PM	SiCl4 pre valve closed
4/4/2011	7:33:47 PM	SiCl4 post valve closed
4/4/2011	7:33:47 PM	Bubbler valve closed
4/4/2011	7:33:47 PM	Helium valve opened
4/4/2011	7:33:47 PM	Main Vac valve opened
4/4/2011	7:33:47 PM	Bypass valve opened
4/4/2011	7:33:47 PM	Helium MFC set to  100.000000
4/4/2011	7:33:47 PM	H2 MFC set to  0.000000
4/4/2011	7:33:47 PM	BCl3 MFC set to  0.000000
4/4/2011	7:33:47 PM	PHl3 MFC set to  0.000000
4/4/2011	7:33:47 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:33:47 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:33:47 PM	Tube furnace set to 0
4/4/2011	7:34:47 PM	Helium valve closed
4/4/2011	7:34:47 PM	H2 valve closed
4/4/2011	7:34:47 PM	BCl3 valve closed
4/4/2011	7:34:47 PM	PH3 valve closed
4/4/2011	7:34:47 PM	SiCl4 pre valve closed
4/4/2011	7:34:47 PM	SiCl4 post valve closed
4/4/2011	7:34:47 PM	Bubbler valve closed
4/4/2011	7:34:47 PM	Main Vac valve opened
4/4/2011	7:34:47 PM	Bypass valve opened
4/4/2011	7:34:47 PM	Helium MFC set to  0.000000
4/4/2011	7:34:47 PM	H2 MFC set to  0.000000
4/4/2011	7:34:47 PM	BCl3 MFC set to  0.000000
4/4/2011	7:34:47 PM	PHl3 MFC set to  0.000000
4/4/2011	7:34:47 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:34:47 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:34:47 PM	Tube furnace set to 0
4/4/2011	7:35:47 PM	H2 valve closed
4/4/2011	7:35:47 PM	BCl3 valve closed
4/4/2011	7:35:47 PM	PH3 valve closed
4/4/2011	7:35:47 PM	SiCl4 pre valve closed
4/4/2011	7:35:47 PM	SiCl4 post valve closed
4/4/2011	7:35:47 PM	Bubbler valve closed
4/4/2011	7:35:47 PM	Helium valve opened
4/4/2011	7:35:47 PM	Main Vac valve opened
4/4/2011	7:35:47 PM	Bypass valve opened
4/4/2011	7:35:47 PM	Helium MFC set to  100.000000
4/4/2011	7:35:47 PM	H2 MFC set to  0.000000
4/4/2011	7:35:47 PM	BCl3 MFC set to  0.000000
4/4/2011	7:35:47 PM	PHl3 MFC set to  0.000000
4/4/2011	7:35:47 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:35:47 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:35:47 PM	Tube furnace set to 0
4/4/2011	7:36:47 PM	Helium valve closed
4/4/2011	7:36:47 PM	H2 valve closed
4/4/2011	7:36:47 PM	BCl3 valve closed
4/4/2011	7:36:47 PM	PH3 valve closed
4/4/2011	7:36:47 PM	SiCl4 pre valve closed
4/4/2011	7:36:47 PM	SiCl4 post valve closed
4/4/2011	7:36:47 PM	Bubbler valve closed
4/4/2011	7:36:47 PM	Main Vac valve opened
4/4/2011	7:36:47 PM	Bypass valve opened
4/4/2011	7:36:47 PM	Helium MFC set to  0.000000
4/4/2011	7:36:47 PM	H2 MFC set to  0.000000
4/4/2011	7:36:47 PM	BCl3 MFC set to  0.000000
4/4/2011	7:36:47 PM	PHl3 MFC set to  0.000000
4/4/2011	7:36:47 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:36:47 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:36:47 PM	Tube furnace set to 0
4/4/2011	7:37:47 PM	H2 valve closed
4/4/2011	7:37:47 PM	BCl3 valve closed
4/4/2011	7:37:47 PM	PH3 valve closed
4/4/2011	7:37:47 PM	SiCl4 pre valve closed
4/4/2011	7:37:47 PM	SiCl4 post valve closed
4/4/2011	7:37:47 PM	Bubbler valve closed
4/4/2011	7:37:47 PM	Helium valve opened
4/4/2011	7:37:47 PM	Main Vac valve opened
4/4/2011	7:37:47 PM	Bypass valve opened
4/4/2011	7:37:47 PM	Helium MFC set to  100.000000
4/4/2011	7:37:47 PM	H2 MFC set to  0.000000
4/4/2011	7:37:47 PM	BCl3 MFC set to  0.000000
4/4/2011	7:37:47 PM	PHl3 MFC set to  0.000000
4/4/2011	7:37:47 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:37:47 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:37:48 PM	Tube furnace set to 0
4/4/2011	7:38:48 PM	Helium valve closed
4/4/2011	7:38:48 PM	H2 valve closed
4/4/2011	7:38:48 PM	BCl3 valve closed
4/4/2011	7:38:48 PM	PH3 valve closed
4/4/2011	7:38:48 PM	SiCl4 pre valve closed
4/4/2011	7:38:48 PM	SiCl4 post valve closed
4/4/2011	7:38:48 PM	Bubbler valve closed
4/4/2011	7:38:48 PM	Main Vac valve opened
4/4/2011	7:38:48 PM	Bypass valve opened
4/4/2011	7:38:48 PM	Helium MFC set to  0.000000
4/4/2011	7:38:48 PM	H2 MFC set to  0.000000
4/4/2011	7:38:48 PM	BCl3 MFC set to  0.000000
4/4/2011	7:38:48 PM	PHl3 MFC set to  0.000000
4/4/2011	7:38:48 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:38:48 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:38:48 PM	Tube furnace set to 0
4/4/2011	7:39:48 PM	H2 valve closed
4/4/2011	7:39:48 PM	BCl3 valve closed
4/4/2011	7:39:48 PM	PH3 valve closed
4/4/2011	7:39:48 PM	SiCl4 pre valve closed
4/4/2011	7:39:48 PM	SiCl4 post valve closed
4/4/2011	7:39:48 PM	Bubbler valve closed
4/4/2011	7:39:48 PM	Helium valve opened
4/4/2011	7:39:48 PM	Main Vac valve opened
4/4/2011	7:39:48 PM	Bypass valve opened
4/4/2011	7:39:48 PM	Helium MFC set to  100.000000
4/4/2011	7:39:48 PM	H2 MFC set to  0.000000
4/4/2011	7:39:48 PM	BCl3 MFC set to  0.000000
4/4/2011	7:39:48 PM	PHl3 MFC set to  0.000000
4/4/2011	7:39:48 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:39:48 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:39:48 PM	Tube furnace set to 0
4/4/2011	7:40:48 PM	Helium valve closed
4/4/2011	7:40:48 PM	H2 valve closed
4/4/2011	7:40:48 PM	BCl3 valve closed
4/4/2011	7:40:48 PM	PH3 valve closed
4/4/2011	7:40:48 PM	SiCl4 pre valve closed
4/4/2011	7:40:48 PM	SiCl4 post valve closed
4/4/2011	7:40:48 PM	Bubbler valve closed
4/4/2011	7:40:48 PM	Main Vac valve opened
4/4/2011	7:40:48 PM	Bypass valve opened
4/4/2011	7:40:48 PM	Helium MFC set to  0.000000
4/4/2011	7:40:48 PM	H2 MFC set to  0.000000
4/4/2011	7:40:48 PM	BCl3 MFC set to  0.000000
4/4/2011	7:40:48 PM	PHl3 MFC set to  0.000000
4/4/2011	7:40:48 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:40:48 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:40:48 PM	Tube furnace set to 0
4/4/2011	7:41:48 PM	H2 valve closed
4/4/2011	7:41:48 PM	BCl3 valve closed
4/4/2011	7:41:48 PM	PH3 valve closed
4/4/2011	7:41:48 PM	SiCl4 pre valve closed
4/4/2011	7:41:48 PM	SiCl4 post valve closed
4/4/2011	7:41:48 PM	Bubbler valve closed
4/4/2011	7:41:48 PM	Helium valve opened
4/4/2011	7:41:48 PM	Main Vac valve opened
4/4/2011	7:41:48 PM	Bypass valve opened
4/4/2011	7:41:48 PM	Helium MFC set to  100.000000
4/4/2011	7:41:48 PM	H2 MFC set to  0.000000
4/4/2011	7:41:48 PM	BCl3 MFC set to  0.000000
4/4/2011	7:41:48 PM	PHl3 MFC set to  0.000000
4/4/2011	7:41:48 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:41:48 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:41:48 PM	Tube furnace set to 0
4/4/2011	7:42:48 PM	Helium valve closed
4/4/2011	7:42:48 PM	H2 valve closed
4/4/2011	7:42:48 PM	BCl3 valve closed
4/4/2011	7:42:48 PM	PH3 valve closed
4/4/2011	7:42:48 PM	SiCl4 pre valve closed
4/4/2011	7:42:48 PM	SiCl4 post valve closed
4/4/2011	7:42:48 PM	Bubbler valve closed
4/4/2011	7:42:48 PM	Main Vac valve opened
4/4/2011	7:42:48 PM	Bypass valve opened
4/4/2011	7:42:48 PM	Helium MFC set to  0.000000
4/4/2011	7:42:48 PM	H2 MFC set to  0.000000
4/4/2011	7:42:48 PM	BCl3 MFC set to  0.000000
4/4/2011	7:42:48 PM	PHl3 MFC set to  0.000000
4/4/2011	7:42:48 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:42:48 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:42:49 PM	Tube furnace set to 0
4/4/2011	7:43:49 PM	H2 valve closed
4/4/2011	7:43:49 PM	BCl3 valve closed
4/4/2011	7:43:49 PM	PH3 valve closed
4/4/2011	7:43:49 PM	SiCl4 pre valve closed
4/4/2011	7:43:49 PM	SiCl4 post valve closed
4/4/2011	7:43:49 PM	Bubbler valve closed
4/4/2011	7:43:49 PM	Helium valve opened
4/4/2011	7:43:49 PM	Main Vac valve opened
4/4/2011	7:43:49 PM	Bypass valve opened
4/4/2011	7:43:49 PM	Helium MFC set to  100.000000
4/4/2011	7:43:49 PM	H2 MFC set to  0.000000
4/4/2011	7:43:49 PM	BCl3 MFC set to  0.000000
4/4/2011	7:43:49 PM	PHl3 MFC set to  0.000000
4/4/2011	7:43:49 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:43:49 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:43:49 PM	Tube furnace set to 0
4/4/2011	7:44:49 PM	Helium valve closed
4/4/2011	7:44:49 PM	H2 valve closed
4/4/2011	7:44:49 PM	BCl3 valve closed
4/4/2011	7:44:49 PM	PH3 valve closed
4/4/2011	7:44:49 PM	SiCl4 pre valve closed
4/4/2011	7:44:49 PM	SiCl4 post valve closed
4/4/2011	7:44:49 PM	Bubbler valve closed
4/4/2011	7:44:49 PM	Main Vac valve opened
4/4/2011	7:44:49 PM	Bypass valve opened
4/4/2011	7:44:49 PM	Helium MFC set to  0.000000
4/4/2011	7:44:49 PM	H2 MFC set to  0.000000
4/4/2011	7:44:49 PM	BCl3 MFC set to  0.000000
4/4/2011	7:44:49 PM	PHl3 MFC set to  0.000000
4/4/2011	7:44:49 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:44:49 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:44:49 PM	Tube furnace set to 0
4/4/2011	7:45:49 PM	H2 valve closed
4/4/2011	7:45:49 PM	BCl3 valve closed
4/4/2011	7:45:49 PM	PH3 valve closed
4/4/2011	7:45:49 PM	SiCl4 pre valve closed
4/4/2011	7:45:49 PM	SiCl4 post valve closed
4/4/2011	7:45:49 PM	Bubbler valve closed
4/4/2011	7:45:49 PM	Helium valve opened
4/4/2011	7:45:49 PM	Main Vac valve opened
4/4/2011	7:45:49 PM	Bypass valve opened
4/4/2011	7:45:49 PM	Helium MFC set to  100.000000
4/4/2011	7:45:49 PM	H2 MFC set to  0.000000
4/4/2011	7:45:49 PM	BCl3 MFC set to  0.000000
4/4/2011	7:45:49 PM	PHl3 MFC set to  0.000000
4/4/2011	7:45:49 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:45:49 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:45:49 PM	Tube furnace set to 0
4/4/2011	7:46:49 PM	Helium valve closed
4/4/2011	7:46:49 PM	H2 valve closed
4/4/2011	7:46:49 PM	BCl3 valve closed
4/4/2011	7:46:49 PM	PH3 valve closed
4/4/2011	7:46:49 PM	SiCl4 pre valve closed
4/4/2011	7:46:49 PM	SiCl4 post valve closed
4/4/2011	7:46:49 PM	Bubbler valve closed
4/4/2011	7:46:49 PM	Main Vac valve opened
4/4/2011	7:46:49 PM	Bypass valve opened
4/4/2011	7:46:49 PM	Helium MFC set to  0.000000
4/4/2011	7:46:49 PM	H2 MFC set to  0.000000
4/4/2011	7:46:49 PM	BCl3 MFC set to  0.000000
4/4/2011	7:46:49 PM	PHl3 MFC set to  0.000000
4/4/2011	7:46:49 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:46:49 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:46:49 PM	Tube furnace set to 0
4/4/2011	7:47:49 PM	H2 valve closed
4/4/2011	7:47:49 PM	BCl3 valve closed
4/4/2011	7:47:49 PM	PH3 valve closed
4/4/2011	7:47:49 PM	SiCl4 pre valve closed
4/4/2011	7:47:49 PM	SiCl4 post valve closed
4/4/2011	7:47:49 PM	Bubbler valve closed
4/4/2011	7:47:49 PM	Helium valve opened
4/4/2011	7:47:49 PM	Main Vac valve opened
4/4/2011	7:47:49 PM	Bypass valve opened
4/4/2011	7:47:49 PM	Helium MFC set to  100.000000
4/4/2011	7:47:49 PM	H2 MFC set to  0.000000
4/4/2011	7:47:49 PM	BCl3 MFC set to  0.000000
4/4/2011	7:47:49 PM	PHl3 MFC set to  0.000000
4/4/2011	7:47:49 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:47:49 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:47:49 PM	Tube furnace set to 0
4/4/2011	7:48:50 PM	Helium valve closed
4/4/2011	7:48:50 PM	H2 valve closed
4/4/2011	7:48:50 PM	BCl3 valve closed
4/4/2011	7:48:50 PM	PH3 valve closed
4/4/2011	7:48:50 PM	SiCl4 pre valve closed
4/4/2011	7:48:50 PM	SiCl4 post valve closed
4/4/2011	7:48:50 PM	Bubbler valve closed
4/4/2011	7:48:50 PM	Main Vac valve opened
4/4/2011	7:48:50 PM	Bypass valve opened
4/4/2011	7:48:50 PM	Helium MFC set to  0.000000
4/4/2011	7:48:50 PM	H2 MFC set to  0.000000
4/4/2011	7:48:50 PM	BCl3 MFC set to  0.000000
4/4/2011	7:48:50 PM	PHl3 MFC set to  0.000000
4/4/2011	7:48:50 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:48:50 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:48:50 PM	Tube furnace set to 0
4/4/2011	7:49:50 PM	H2 valve closed
4/4/2011	7:49:50 PM	BCl3 valve closed
4/4/2011	7:49:50 PM	PH3 valve closed
4/4/2011	7:49:50 PM	SiCl4 pre valve closed
4/4/2011	7:49:50 PM	SiCl4 post valve closed
4/4/2011	7:49:50 PM	Bubbler valve closed
4/4/2011	7:49:50 PM	Helium valve opened
4/4/2011	7:49:50 PM	Main Vac valve opened
4/4/2011	7:49:50 PM	Bypass valve opened
4/4/2011	7:49:50 PM	Helium MFC set to  100.000000
4/4/2011	7:49:50 PM	H2 MFC set to  0.000000
4/4/2011	7:49:50 PM	BCl3 MFC set to  0.000000
4/4/2011	7:49:50 PM	PHl3 MFC set to  0.000000
4/4/2011	7:49:50 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:49:50 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:49:50 PM	Tube furnace set to 0
4/4/2011	7:50:50 PM	Helium valve closed
4/4/2011	7:50:50 PM	H2 valve closed
4/4/2011	7:50:50 PM	BCl3 valve closed
4/4/2011	7:50:50 PM	PH3 valve closed
4/4/2011	7:50:50 PM	SiCl4 pre valve closed
4/4/2011	7:50:50 PM	SiCl4 post valve closed
4/4/2011	7:50:50 PM	Bubbler valve closed
4/4/2011	7:50:50 PM	Main Vac valve opened
4/4/2011	7:50:50 PM	Bypass valve opened
4/4/2011	7:50:50 PM	Helium MFC set to  0.000000
4/4/2011	7:50:50 PM	H2 MFC set to  0.000000
4/4/2011	7:50:50 PM	BCl3 MFC set to  0.000000
4/4/2011	7:50:50 PM	PHl3 MFC set to  0.000000
4/4/2011	7:50:50 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:50:50 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:50:50 PM	Tube furnace set to 0
4/4/2011	7:51:50 PM	H2 valve closed
4/4/2011	7:51:50 PM	BCl3 valve closed
4/4/2011	7:51:50 PM	PH3 valve closed
4/4/2011	7:51:50 PM	SiCl4 pre valve closed
4/4/2011	7:51:50 PM	SiCl4 post valve closed
4/4/2011	7:51:50 PM	Bubbler valve closed
4/4/2011	7:51:50 PM	Helium valve opened
4/4/2011	7:51:50 PM	Main Vac valve opened
4/4/2011	7:51:50 PM	Bypass valve opened
4/4/2011	7:51:50 PM	Helium MFC set to  100.000000
4/4/2011	7:51:50 PM	H2 MFC set to  0.000000
4/4/2011	7:51:50 PM	BCl3 MFC set to  0.000000
4/4/2011	7:51:50 PM	PHl3 MFC set to  0.000000
4/4/2011	7:51:50 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:51:50 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:51:50 PM	Tube furnace set to 0
4/4/2011	7:52:50 PM	Helium valve closed
4/4/2011	7:52:50 PM	H2 valve closed
4/4/2011	7:52:50 PM	BCl3 valve closed
4/4/2011	7:52:50 PM	PH3 valve closed
4/4/2011	7:52:50 PM	SiCl4 pre valve closed
4/4/2011	7:52:50 PM	SiCl4 post valve closed
4/4/2011	7:52:50 PM	Bubbler valve closed
4/4/2011	7:52:50 PM	Main Vac valve opened
4/4/2011	7:52:50 PM	Bypass valve opened
4/4/2011	7:52:50 PM	Helium MFC set to  0.000000
4/4/2011	7:52:50 PM	H2 MFC set to  0.000000
4/4/2011	7:52:50 PM	BCl3 MFC set to  0.000000
4/4/2011	7:52:50 PM	PHl3 MFC set to  0.000000
4/4/2011	7:52:50 PM	SiCl4 MFC set to  0.000000
4/4/2011	7:52:50 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	7:52:50 PM	Tube furnace set to 0
4/4/2011	7:52:51 PM	Run finished at 7:52 PM
4/4/2011	7:52:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/4/2011	8:07:53 PM	Helium MFC set to  40.000000
4/4/2011	8:07:53 PM	Helium valve opened
4/4/2011	8:20:37 PM	Helium valve closed
4/4/2011	8:22:20 PM	Recipe started at 8:22 PM
4/4/2011	8:22:20 PM	Helium valve closed
4/4/2011	8:22:20 PM	BCl3 valve closed
4/4/2011	8:22:20 PM	PH3 valve closed
4/4/2011	8:22:20 PM	SiCl4 pre valve closed
4/4/2011	8:22:20 PM	SiCl4 post valve closed
4/4/2011	8:22:20 PM	Main Vac valve closed
4/4/2011	8:22:20 PM	Bypass valve closed
4/4/2011	8:22:20 PM	Bubbler valve closed
4/4/2011	8:22:20 PM	H2 valve opened
4/4/2011	8:22:20 PM	Helium MFC set to  0.000000
4/4/2011	8:22:20 PM	H2 MFC set to  500.000000
4/4/2011	8:22:20 PM	BCl3 MFC set to  0.000000
4/4/2011	8:22:20 PM	PHl3 MFC set to  0.000000
4/4/2011	8:22:20 PM	SiCl4 MFC set to  0.000000
4/4/2011	8:22:20 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	8:22:20 PM	Tube furnace set to 0
4/4/2011	8:23:43 PM	Helium valve closed
4/4/2011	8:23:43 PM	BCl3 valve closed
4/4/2011	8:23:43 PM	PH3 valve closed
4/4/2011	8:23:43 PM	SiCl4 pre valve closed
4/4/2011	8:23:43 PM	SiCl4 post valve closed
4/4/2011	8:23:43 PM	Main Vac valve closed
4/4/2011	8:23:43 PM	Bypass valve closed
4/4/2011	8:23:43 PM	H2 valve opened
4/4/2011	8:23:43 PM	Bubbler valve opened
4/4/2011	8:23:43 PM	Helium MFC set to  0.000000
4/4/2011	8:23:43 PM	H2 MFC set to  500.000000
4/4/2011	8:23:43 PM	BCl3 MFC set to  0.000000
4/4/2011	8:23:43 PM	PHl3 MFC set to  0.000000
4/4/2011	8:23:43 PM	SiCl4 MFC set to  0.000000
4/4/2011	8:23:43 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	8:23:43 PM	Tube furnace set to 1000
4/4/2011	8:43:43 PM	Helium valve closed
4/4/2011	8:43:43 PM	BCl3 valve closed
4/4/2011	8:43:43 PM	PH3 valve closed
4/4/2011	8:43:43 PM	Main Vac valve closed
4/4/2011	8:43:43 PM	Bypass valve closed
4/4/2011	8:43:43 PM	H2 valve opened
4/4/2011	8:43:43 PM	SiCl4 pre valve opened
4/4/2011	8:43:43 PM	SiCl4 post valve opened
4/4/2011	8:43:43 PM	Bubbler valve opened
4/4/2011	8:43:43 PM	Helium MFC set to  0.000000
4/4/2011	8:43:43 PM	H2 MFC set to  500.000000
4/4/2011	8:43:43 PM	BCl3 MFC set to  0.000000
4/4/2011	8:43:43 PM	PHl3 MFC set to  0.000000
4/4/2011	8:43:43 PM	SiCl4 MFC set to  75.000000
4/4/2011	8:43:43 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	8:43:43 PM	Tube furnace set to 1000
4/4/2011	9:03:43 PM	H2 valve closed
4/4/2011	9:03:43 PM	BCl3 valve closed
4/4/2011	9:03:43 PM	PH3 valve closed
4/4/2011	9:03:43 PM	SiCl4 pre valve closed
4/4/2011	9:03:43 PM	SiCl4 post valve closed
4/4/2011	9:03:43 PM	Main Vac valve closed
4/4/2011	9:03:43 PM	Bypass valve closed
4/4/2011	9:03:43 PM	Helium valve opened
4/4/2011	9:03:43 PM	Bubbler valve opened
4/4/2011	9:03:43 PM	Helium MFC set to  500.000000
4/4/2011	9:03:43 PM	H2 MFC set to  0.000000
4/4/2011	9:03:43 PM	BCl3 MFC set to  0.000000
4/4/2011	9:03:43 PM	PHl3 MFC set to  0.000000
4/4/2011	9:03:43 PM	SiCl4 MFC set to  0.000000
4/4/2011	9:03:43 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	9:03:43 PM	Tube furnace set to 0
4/4/2011	9:29:34 PM	H2 valve closed
4/4/2011	9:29:34 PM	BCl3 valve closed
4/4/2011	9:29:34 PM	PH3 valve closed
4/4/2011	9:29:34 PM	SiCl4 pre valve closed
4/4/2011	9:29:34 PM	SiCl4 post valve closed
4/4/2011	9:29:34 PM	Main Vac valve closed
4/4/2011	9:29:34 PM	Bypass valve closed
4/4/2011	9:29:34 PM	Helium valve opened
4/4/2011	9:29:34 PM	Bubbler valve opened
4/4/2011	9:29:34 PM	Helium MFC set to  500.000000
4/4/2011	9:29:34 PM	H2 MFC set to  0.000000
4/4/2011	9:29:34 PM	BCl3 MFC set to  0.000000
4/4/2011	9:29:34 PM	PHl3 MFC set to  0.000000
4/4/2011	9:29:34 PM	SiCl4 MFC set to  0.000000
4/4/2011	9:29:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	9:29:34 PM	Tube furnace set to 0
4/4/2011	9:29:38 PM	Helium valve closed
4/4/2011	9:29:38 PM	H2 valve closed
4/4/2011	9:29:38 PM	BCl3 valve closed
4/4/2011	9:29:38 PM	PH3 valve closed
4/4/2011	9:29:38 PM	SiCl4 pre valve closed
4/4/2011	9:29:38 PM	SiCl4 post valve closed
4/4/2011	9:29:38 PM	Main Vac valve closed
4/4/2011	9:29:38 PM	Bypass valve closed
4/4/2011	9:29:38 PM	Bubbler valve closed
4/4/2011	9:29:38 PM	Helium MFC set to  0.000000
4/4/2011	9:29:38 PM	H2 MFC set to  0.000000
4/4/2011	9:29:38 PM	BCl3 MFC set to  0.000000
4/4/2011	9:29:38 PM	PHl3 MFC set to  0.000000
4/4/2011	9:29:38 PM	SiCl4 MFC set to  0.000000
4/4/2011	9:29:38 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	9:29:39 PM	Tube furnace set to 0
4/4/2011	9:29:39 PM	Run finished at 9:29 PM
4/4/2011	9:31:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2011	9:31:44 PM	Recipe started at 9:31 PM
4/4/2011	9:31:44 PM	Helium valve closed
4/4/2011	9:31:44 PM	H2 valve closed
4/4/2011	9:31:44 PM	BCl3 valve closed
4/4/2011	9:31:44 PM	PH3 valve closed
4/4/2011	9:31:44 PM	SiCl4 pre valve closed
4/4/2011	9:31:44 PM	SiCl4 post valve closed
4/4/2011	9:31:44 PM	Main Vac valve closed
4/4/2011	9:31:44 PM	Bubbler valve closed
4/4/2011	9:31:44 PM	Bypass valve opened
4/4/2011	9:31:44 PM	Helium MFC set to  0.000000
4/4/2011	9:31:44 PM	H2 MFC set to  0.000000
4/4/2011	9:31:44 PM	BCl3 MFC set to  0.000000
4/4/2011	9:31:44 PM	PHl3 MFC set to  0.000000
4/4/2011	9:31:44 PM	SiCl4 MFC set to  0.000000
4/4/2011	9:31:44 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	9:31:45 PM	Tube furnace set to 0
4/4/2011	9:32:15 PM	Helium valve closed
4/4/2011	9:32:15 PM	H2 valve closed
4/4/2011	9:32:15 PM	BCl3 valve closed
4/4/2011	9:32:15 PM	PH3 valve closed
4/4/2011	9:32:15 PM	SiCl4 pre valve closed
4/4/2011	9:32:15 PM	SiCl4 post valve closed
4/4/2011	9:32:15 PM	Bubbler valve closed
4/4/2011	9:32:15 PM	Main Vac valve opened
4/4/2011	9:32:15 PM	Bypass valve opened
4/4/2011	9:32:15 PM	Helium MFC set to  0.000000
4/4/2011	9:32:15 PM	H2 MFC set to  0.000000
4/4/2011	9:32:15 PM	BCl3 MFC set to  0.000000
4/4/2011	9:32:15 PM	PHl3 MFC set to  0.000000
4/4/2011	9:32:15 PM	SiCl4 MFC set to  0.000000
4/4/2011	9:32:15 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	9:32:15 PM	Tube furnace set to 0
4/4/2011	9:32:15 PM	Run finished at 9:32 PM
4/4/2011	9:32:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2011	9:37:15 PM	Helium MFC set to  20.000000
4/4/2011	9:37:16 PM	Helium valve opened
4/4/2011	9:41:34 PM	Helium valve closed
4/4/2011	9:42:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/4/2011	9:42:04 PM	Recipe started at 9:42 PM
4/4/2011	9:42:04 PM	Helium valve closed
4/4/2011	9:42:04 PM	H2 valve closed
4/4/2011	9:42:04 PM	BCl3 valve closed
4/4/2011	9:42:04 PM	PH3 valve closed
4/4/2011	9:42:04 PM	SiCl4 pre valve closed
4/4/2011	9:42:04 PM	SiCl4 post valve closed
4/4/2011	9:42:04 PM	Main Vac valve closed
4/4/2011	9:42:04 PM	Bypass valve closed
4/4/2011	9:42:04 PM	Bubbler valve closed
4/4/2011	9:42:04 PM	Helium MFC set to  0.000000
4/4/2011	9:42:04 PM	H2 MFC set to  0.000000
4/4/2011	9:42:04 PM	BCl3 MFC set to  0.000000
4/4/2011	9:42:04 PM	PHl3 MFC set to  0.000000
4/4/2011	9:42:04 PM	SiCl4 MFC set to  0.000000
4/4/2011	9:42:04 PM	Bypass solenoid MFC set to  0.000000
4/4/2011	9:42:04 PM	Tube furnace set to 0
4/4/2011	9:42:05 PM	Run finished at 9:42 PM
4/4/2011	9:42:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
